Rotary exchanging method and rotary exchanging device for double workpiece platforms based on synchronous steering of turntable gear

Abstract

The invention discloses a rotary exchanging method and a rotary exchanging device for double workpiece platforms based on synchronous steering of a turntable gear and belongs to semiconductor manufacturing equipment. The device comprises a rotary platform switching device consisting of a rotary motor stator, a rotary motor rotor, a rotating platform embedded in a base station and a rotary platform switching gear, wherein a liftable first shaft coupling device and a second shaft coupling device are arranged on the rotary platform; a first workpiece platform rotating shaft is arranged at the bottom of a first workpiece platform; a first workpiece platform switching device is arranged on the lateral surface of the first workpiece platform; a first workpiece platform gear is arranged at the waist part of the first workpiece platform; a second workpiece platform rotating shaft is arranged at the bottom of a second workpiece platform; a second workpiece platform switching device is arrangedon the lateral surface of the second workpiece platform; and a second workpiece platform gear is arranged at the waist part of the second workpiece platform. According to the rotary exchanging methodand the rotary exchanging device disclosed by the invention, in the switching process of double platforms, the orientations of the workpiece platforms are always kept unchanged and the problems that a cable in a traditional rotary platform switching scheme is not convenient to mount and an interferometer loses a target are solved; and meanwhile, the rotary exchanging method and the rotary exchanging device disclosed by the invention have the advantages that a rotational inertia in the specific implementation process is small, the required torque under the same platform switching time is smalland the like.

Description

Technical field [0001] The invention belongs to the technical field of semiconductor manufacturing equipment, and mainly relates to a method and device for rotating and exchanging double worktables based on synchronous direction adjustment of turntable gears. Background technique [0002] Lithography machine is one of the important ultra-precision equipment in the manufacture of very large scale integrated circuits. In the step-and-scan projection lithography machine widely used at present, the work stage technology is one of the core technologies of the lithography machine. The main function of the workpiece table is to carry silicon wafers to achieve nanometer-precision positioning under high-speed and high-acceleration conditions, and to cooperate with the processing and manufacturing processes of loading, pre-alignment, alignment, exposure and unloading in the photolithography process. The lithography machine work piece technology is very important to improve the three perfo...

AI Technical Summary

Problems solved by technology

In the present invention, the double-table rotation is switched to three beats, and the workpiece table does not spin during the table-changing process, which solves the problems of phase inversion of the workpiece table, cable entanglement, laser interferometer target loss, etc.

At the same time, the present invention adopts the platform changing method that the workpiece table rotates around the center of the abutment, avoids rotating the whole abutment, and solves the problems of large radius of gyration and large moment of inertia in the prior art, and the moment of inertia is small. Shorter times improve workbench operating efficiency and lithography machine productivity

The present invention also solves the problems of large impact torque and many beats in the existing linear channel change scheme, and can adopt a smaller mass balance system, which is beneficial to shorten the balance time, simplify the system at the same time, reduce costs, and shorten the cycle time of channel change. It takes less time to change the platform, which can effectively improve the productivity of the lithography machine

Images