Acousto-optic deflector with large scanning angle

An acousto-optic deflector and scanning angle technology, applied in the directions of instruments, optics, nonlinear optics, etc., can solve the problems of the acousto-optic deflector being unable to withstand high power, the scanning angle range limitation, etc., to reduce the bandwidth and increase the scanning angle. angle, the effect of improving diffraction efficiency

CN102540507AInactive Publication Date: 2012-07-04HUAZHONG UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2012-07-04
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses an acousto-optic deflector with a large scanning angle, which is characterized in that: an off-axis angle of ultrasonic propagation of the acousto-optic deflector is 8-11 DEG; the length of a transducer is 0.5-2mm; and a driving device for enlarging the acousto-optic deflector is a pulse driving circuit, and the average power of the pulse driving circuit is 3-10W. The work time of the pulse driving circuit in a pulse period is less than the thermal relaxation time of a device and the rest time is more than the thermal relaxation time of the device. According to the invention, the problem that the range of the scanning angle is restricted due to the disability of the acousto-optic deflector for bearing high power is overcome, the scanning angle reaches 4-6 DEG which is 2-3 times of the scanning angles of conventional acousto-optic deflectors, and rapid laser scanning in large fields of view can be realized; and the acousto-optic deflector with the large scanning angle is suitable for the occasions requiring large scanning angles and discontinuous scanning and can be applied to the fields of biological microscopy imaging, laser rapid displaying and recoding systems, laser measurement and control, laser micro-processing and the like.
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Description

technical field

[0001] The invention belongs to the technical field of laser scanning, and specifically relates to a method for enlarging the scanning angle of an acousto-optic deflector by changing the design of the acousto-optic deflector and using the pulse power working mode, which is applied to biological microscopic imaging, laser rapid display and recording systems, Laser measurement and control, laser micromachining and other fields. Background technique

[0002] The AOD is a non-mechanical scanning element. The interaction between the laser beam and the ultrasonic wave produces diffracted light, and the deflection angle of the diffracted light is linearly related to the frequency of the sound wave. Since the change of the sound wave frequency is realized by the electronic circuit and the piezoelectric transducer, it can reach a very high speed, and because there is no mechanical inertia, it can quickly stabilize at a specified frequency, so this scanning device ha...

Examples

Embodiment Construction

[0017] like figure 1 As shown, the acousto-optic deflector designed in the present invention includes an acousto-optic crystal 1 and a piezoelectric transducer 2. The piezoelectric transducer 2 generates ultrasonic waves 3 that propagate in the acousto-optic crystal 1. After the incident light 4 interacts with the ultrasonic waves 3 Zero-order light 5 and first-order diffracted light 6 are generated. The input signal of the piezoelectric transducer 2 is a sinusoidal signal of pulse power.

[0018] exist figure 1 In the example shown, tellurium dioxide is used as the material of the acousto-optic deflector, the working mode adopts the slow shear ultrasonic wave along the [110] axis of the tellurium dioxide crystal, and the light propagates along the [001] axis of the tellurium dioxide crystal. In this working mode, the speed of sound is very small, which is beneficial to improve the scanning angle.

[0019] exist figure 1 In the example shown, the transducer off-axis angle ...