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Manufacturing method of wedge-shaped super-lens
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A super-lens and wedge-type technology, applied in the field of lens preparation, can solve the problems of difficulty in manufacturing the wedge-type super-lens and the like
Active Publication Date: 2014-07-09
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology
[0004] The technical problem to be solved by the present invention is to propose a novel method for preparing a wedge-shaped metalens for the manufacturing difficulties of a wedge-shaped metalens
Method used
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Embodiment 1
[0029] Embodiment 1, preparation is made up of the wedge type hyperlens that is made up of 10 layers of multilayer films, and the manufacturing process is as follows:
[0030] (1) Coating 500nm of PMMA on a flat quartz substrate as a sacrificial layer, and then depositing 50nm of silicon as a masking layer, as figure 1 shown;
[0031] (2) Apply photoresist ARP3120 on the silicon masking layer, and obtain a photoresist linear structure with a photoresist line width of 10 microns, a blank area width of 20 microns, and a length of 20 mm after contact exposure and development, such as figure 2 shown;
[0032] (3) Use RIE to etch the photoresist linear structure to the siliconmask layer, such as image 3 shown;
[0033] (4) Use a silicon masking layer as a mask, with a high cavity pressure O 2 Perform isotropic etching on the PMMA sacrificial layer, so that there is a 400nm silicon mask layer suspended at the edge of the linear structure, such as Figure 4 shown;
[0034] (...
Embodiment 2
[0036] Embodiment 2, preparation of wedge-shaped metalens, the manufacturing process is as follows:
[0037] (1) On the flat K9 glass substrate, the negative photoresist of 800nm is coated as a sacrificial layer, and then the chromium of 60nm is deposited as a masking layer;
[0038] (2) Apply photoresist ARP3170 on the chromium masking layer, obtain a photoresist linear structure with a line width of 30 microns, a blank area width of 10 microns, and a length of 500 microns after mobile exposure and development;
[0039] (3) transfer the photoresist linear structure etching to the chromiummask layer with IBE;
[0040] (4) Use a chromium masking layer as a mask, and use a high cavity pressure O 2 Carry out isotropic RIE etching on the negative photoresist sacrificial layer of ARP3120, so that the chromium masking layer with a width of 500nm at the edge of the linear structure is suspended;
[0041] (5) At an inclination angle of 160 degrees perpendicular to the direction o...
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Abstract
The invention discloses a manufacturing method of a wedge-shaped super-lens, which is used for manufacturing the wedge-shaped super-lens for achieving super-resolution imaging and mainly includes steps: sequentially coating or depositing a sacrificial layer and a masking layer on a level ultraviolet transparent substrate; coatingphotoresist on the masking layer for exposing to obtain a straight-line structure; etching and transferring the straight-line structure to the masking layer; performing isotropic etching on the sacrificial layer by using the masking layer for masking to lead the masking layer portion to suspend in the air; slantingly evaporating a multilayer film; and removing the sacrificial layer and the masking layer to obtain the wedge-shaped super-lens. In the manufacturing method, the wedge-shaped super-lens for achieving super-resolution imaging can be manufactured simply through conventional photo-etching, ion-beam etching (IBE), reactive ion etching (RIE) or wet etching and shadow evaporation.
Description
technical field [0001] The invention relates to the technical field of lens preparation, in particular to a preparation method of a wedge-shaped super-lens, which is used for manufacturing a wedge-shaped super-lens for super-resolution imaging. Background technique [0002] Metalenses can break through the diffraction limit of light and realize imaging or photolithography on a scale much smaller than the wavelength of light. It has great application value in the fields of microelectronics, nanoprocessing, and biological detection. [0003] Among them, the wedge-shaped superlens is a kind of superlens with a relatively simple structure. Its key structure is a multilayer film composed of metal / dielectric film layers and an inclined section on the multilayer film. The inclined section acts as a superlens during observation. The phase plane of , the plane multilayer film surface directly below the inclined tangent plane is used as the object plane of the metalens. If the tiny o...
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Patent Type & Authority Patents(China)
IPC IPC(8): G03F1/80G03F7/20B82Y10/00
Inventor 罗先刚王长涛赵泽宇冯沁刘凯鹏胡承刚黄成杨磊磊陶兴张鸶懿
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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