High-linearity fully differential digital micro-accelerometer interface circuit system

An accelerometer and interface circuit technology, applied in the field of MEMS inertial devices, can solve problems such as reducing system linearity, achieve the effects of improving system linearity, suppressing zero drift, and reducing harmonic distortion

Inactive Publication Date: 2012-08-01
HARBIN ENG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, for the fully differential ΣΔ signal processing structure, there is a main problem: in the differential structure, the driving signal is applied to the active electrode, so the feedback voltage can only be applied to the fixed electrode. When feedback, the active electrode is grounded, and the two fixed electrodes

Method used

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  • High-linearity fully differential digital micro-accelerometer interface circuit system
  • High-linearity fully differential digital micro-accelerometer interface circuit system
  • High-linearity fully differential digital micro-accelerometer interface circuit system

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Embodiment Construction

[0022] figure 1 It shows the block diagram of the high linearity fully differential digital accelerometer interface circuit system of this embodiment.

[0023] Such as figure 1 As shown, the interface circuit system has: a driving signal generating unit 101, a fully differential charge integrator 102, a fully differential post amplifier 103, a fully differential predistorter 104, a correlated double sampling and sample-and-hold circuit 105, a fully differential electrical integration device 106, 1-bit dynamic comparator 107, 1-bit analog-to-analog (D / A) converter 108, 1-bit electrostatic force feedback 109, and clock signal generator 110.

[0024] The integrator in the ΣΔ modulator is composed of the sensitive structure 100 of the micro accelerometer and the fully differential electrical integrator 106. Under the control of the clock signal generator, it provides high low-frequency gain, obtains a high-precision 1-bit digital output, and A fully differential closed-loop stru...

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PUM

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Abstract

The invention belongs to the field of MEMS (Micro-Electro-Mechanical Systems) inertia devices, and particularly relates to a capacitance type micro-accelerometer digital output fully differential digital micro-accelerometer interface circuit system. The system comprises a drive signal generating part, a fully differential charge integrator, a fully differential post-amplifier, a fully differential pre-distorter, a relative dual-sampling and sampling retaining circuit, a fully electric integrator, a dynamic comparator, a D/A (Digital/Audio) converter and an electrostatic force feedback device. The system improves the linearity of an accelerometer system, effectively lowers the quantization noise of D/A conversion, restrains zero shift, reduces common mode interference generated by switching charge injection and a substrate noise, improves power supply rejection ration (PSRR), and reduces harmonic distortion.

Description

technical field [0001] The invention belongs to the field of MEMS inertial devices, and in particular relates to a fully differential digital accelerometer interface circuit system with digital output of a capacitive micro accelerometer. Background technique [0002] MEMS (Micro Electromechanical System) is developed on the basis of microelectronics technology. Devices made with MEMS technology are widely used in aerospace due to their advantages of miniaturization, intelligence, integration, and high reliability. , automobiles, biomedicine, environmental monitoring and almost all fields that people come into contact with. Micromachined accelerometers are one of the most important MEMS devices, second only to pressure sensors in terms of market sales. Micro-accelerometers have the advantages of small size, low power consumption, good stability, high reliability, and convenience for mass production, and are widely used in the automotive industry, aerospace fields, and consum...

Claims

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Application Information

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IPC IPC(8): H03M3/02
Inventor 刘云涛邵雷高松松
Owner HARBIN ENG UNIV
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