Polishing accelerating agent for glass and silicon-containing compound and production method and application thereof
A technology of polishing accelerator and silicon compound, which is applied in the direction of chemical instruments and methods, polishing compositions containing abrasives, polishing compositions, etc., which can solve the problems of rapid wear of polishing machines, low flattening polishing efficiency, high solid content of polishing powder, etc. problems, achieve stable polishing effect, improve flattening polishing efficiency, and reduce the amount of polishing powder
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Embodiment 1
[0024] Preparation:
[0025] Weigh 100 grams of polyacrylic acid (molecular weight: 10,000), and 400 grams of polypropylene alcohol ether, add them into 5,000 grams of water, and stir evenly. Then add 2000 grams of water glass Na with a mol ratio of 2.1 2 O.nSiO 2 , stir well. Then add 300 grams of decane polyethylene oxide phosphate, and adjust the pH value to 12 with phosphoric acid.
[0026] Raise the temperature of the above mixed suspension to 40°C, keep it warm for 6 hours, then cool down to 25°C, and then adjust the pH to 8 with phosphoric acid.
Embodiment 2
[0037] Preparation:
[0038] Weigh 200 grams of polyethylamine (molecular weight 10000), 500 grams of alkyl ether alcohol, add to 5000 grams of water, and stir evenly. Then add 3000 grams of K with a molar ratio of 2.1 2 O.nSiO 2 , stir well. Then add 300 g of decane polyethylene oxide phosphate, and adjust the pH value to 9 with phosphoric acid.
[0039] Raise the temperature of the above mixed suspension to 60°C, keep it warm for 2 hours, then lower the temperature to 25°C, and adjust the pH to 12 with phosphoric acid.
[0040] Applications:
[0041] 1), in 4500 grams of water, add 250 grams of polishing accelerator prepared by the above formula and synthesis process, stir well. Then add 250 grams of Tianjiao Qingmei mixed rare earth polishing powder purchased on the market, stir well to form a polishing liquid, which can be used.
[0042] The prepared samples were polished on a Logitech CDP single-side polisher. Down pressure: 1psi, rotation speed of the lower plate ...
Embodiment 3
[0048] Preparation:
[0049] Take by weighing 200 grams of polymaleic acid (molecular weight 20000), add in 5000 grams of water, stir well. Then add 3000 grams of water glass Na with a mol ratio of 2.1 2 O.nSiO 2 , stir well. Then add 300 g of decane polyethylene oxide phosphate, and adjust the pH value to 10 with phosphoric acid.
[0050] Raise the temperature of the above mixed suspension to 90°C, keep it warm for 1 hour, then lower the temperature to 25°C, and adjust the pH to 8 with phosphoric acid.
[0051]Applications:
[0052] 1), in 4500 grams of water, add 500 grams of polishing accelerator prepared by the above formula and synthesis process, stir well. Then add 500 grams of zirconia (1.5 microns in particle size) purchased on the market and stir well to form a polishing solution. The pH is adjusted to 9.3 and can be used.
[0053] The prepared samples were polished on a Logitech CDP single-side polisher. Down pressure: 1psi, rotation speed of the lower plate a...
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