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Composite piezoelectric body, manufacturing method of the composite piezoelectric body, and composite piezoelectric element using the composite piezoelectric body

A technology of piezoelectric body and piezoelectric ceramics, which is applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, electrical components, etc., and can solve the defects of composite piezoelectric components , It is difficult to obtain normal power-on and other problems, so as to prevent defects, prevent electrode disconnection, and improve strength.

Active Publication Date: 2015-11-25
TAYCA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] However, in recent years, these probes require fine-pitch processing with a cutting width of 0.1 mm or less. To achieve such precision processing, the composite piezoelectric element described in Patent Document 1 occasionally suffers from defects.
[0014] That is to say, when performing the fine-pitch processing required in recent years, since the width of the processed piezoelectric element becomes smaller, the problem that there are occasionally many piezoelectric elements with defective parts has become more and more superficial, and Occasionally, it is difficult to get normal power on

Method used

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  • Composite piezoelectric body, manufacturing method of the composite piezoelectric body, and composite piezoelectric element using the composite piezoelectric body
  • Composite piezoelectric body, manufacturing method of the composite piezoelectric body, and composite piezoelectric element using the composite piezoelectric body
  • Composite piezoelectric body, manufacturing method of the composite piezoelectric body, and composite piezoelectric element using the composite piezoelectric body

Examples

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Effect test

Embodiment 1

[0084] First, soft lead zirconate titanate series ceramic powder (manufactured by TAYCA Corporation: L-155N, electromechanical coupling coefficient k 33 77%, the relative permittivity is 5700, the Curie temperature is 155 ℃) and after degreasing treatment, it is calcined at a temperature of 1200 ℃ to obtain a lead zirconate titanate series ceramic sintered body. The obtained lead zirconate titanate series ceramic sintered body was processed with a surface grinder and a double-sided grinder to obtain image 3 The piezoelectric ceramic 8a shown in (a) is 60 mm in length, 10 mm in width, and 0.80 mm in thickness.

[0085] Secondly, using a cutting machine with a blade width of 30 μm, the rectangular plate-shaped piezoelectric ceramic 8a prepared above is processed in parallel with one side to form grooves 9 with a pitch of 100 μm and a depth of 0.60 mm. image 3 As shown in (b), piezoelectric ceramics 8 b having a plurality of upright piezoelectric ceramic corner posts with a si...

Embodiment 2

[0095] Compared with Example 1, except that the thickness dimension was changed to 0.45 mm, the same process as Example 1 was used to prepare a 2-2 type composite piezoelectric element with a volume ratio of piezoelectric ceramics of 70%.

Embodiment 3

[0097] A 2-2 type composite piezoelectric element with a piezoelectric ceramic volume ratio of 60% was prepared by the same procedure as in Example 1, except for forming a plurality of upright ceramic corner columns of 45 μm×60 mm×0.6 mm.

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Abstract

[Object] There has been a need for a composite piezoelectric body and a composite piezoelectric element using the composite piezoelectric body which does not cause electrode defects, disconnection, and peeling even if the piezoelectric body is subjected to fine-pitch processing. [Solution] A composite piezoelectric body of the present invention includes a piezoelectric ceramic and an organic polymer material containing air bubbles mixed therein, wherein among surfaces of the piezoelectric ceramic and the organic polymer material on which an electrode is to be formed, an insulating layer is formed on the entire or a portion of the surface of the organic polymer material on which the electrode is to be formed.

Description

technical field [0001] The present invention relates to a composite piezoelectric body. More specifically, it relates to a composite piezoelectric body free from defects, disconnection, and peeling of electrodes, a method for producing the composite piezoelectric body, and a composite piezoelectric element using the composite piezoelectric body. Background technique [0002] Various piezoelectric elements are known, which convert an externally applied displacement into electricity or vice versa. The applicant of the present patent has also developed a composite piezoelectric element described in Patent Document 1, which has piezoelectric ceramics and an organic polymer body doped with air bubbles inside. [0003] Here, the composite piezoelectric element described in Patent Document 1 is obtained by figure 2 (b) shown in the processing process and made. [0004] That is, it was produced through the following steps. First, groove processing is performed to form a pluralit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/37H01L41/18H01L41/29
CPCH01L41/37H01L41/183H01L41/29Y10T29/42H10N30/852H10N30/06H10N30/092
Inventor 越智贵之久保田弘贵
Owner TAYCA CORP