Method for constructing microelectrode pair array on surface of silicon chip containing hydrophobic silicon column

Abstract

The invention belongs to the electronic circuit field, and relates to large area and orientationally arranged nanowires formed on a surface of a silicon chip containing hydrophobic silicon columns, and relates to a method for constructing a microelectrode pair array. According to the invention, a method for grafting silicon fluoride on the surface of the silicon chip containing the hydrophilic silicon column array is employed, thereby the contact angle of the hydrophilic silicon column array and water is increased from 10 DEG to more than 150 DEG to obtain the silicon chip containing the hydrophobic silicon column array. An aqueous solution containing a substance for forming the nanowires is driven for flowing through the surface of the hydrophobic silicon columns with a uniform speed, thereby the orientationally arranged nanowires with diameter of nano scale formed on the top of two adjacent silicon columns in the hydrophobic silicon column array can be formed with large area and rapidity, and the nanowires are connected to two silicon columns to form the microelectrode pairs; thereby several microelectrode pairs form the microelectrode pair array. The method of the invention can adjust the thickness, length and spatial arrangement mode of the nanowires.

Description

technical field

[0001] The invention belongs to the field of electronic circuits, and in particular relates to a method for forming a large-area oriented array of nanowires on the surface of a silicon wafer containing hydrophobic silicon pillars, thereby constructing a micro-electrode pair array. Background technique

[0002] A microelectrode refers to an electrode whose one-dimensional size is in the order of microns (1×10 -6 m) to nanometer (1×10 -9 m) class of electrodes. When the one-dimensional size of the electrode is reduced from the millimeter level to the micron level, it exhibits many excellent electrochemical properties. For example, the microelectrode is not only beneficial to the in vivo analysis because of the small size of the electrode, but more importantly, it has incomparable properties of conventional electrodes. The advantages, that is, extremely high steady-state current density, extremely short response time, small polarization current, small ohmic vo...

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