Manufacturing method and device for fibre laser and electrochemical complex nanosecond pulse deposition

Abstract

The invention relates to a manufacturing methd and device for fibre laser and electrochemical complex nanosecond pulse deposition. According to the invention, a fibre laser technology is introduced to an electrochemical deposition manufacturing system to effectively increase the flexibility of the optical beam transmission and is combined with a numerical control machining system to realize a processing requirement of a complex three-dimensional space structure. In the machining process, a laser beam with nanosecond pulse is coupled with electrochemical nanosecond pulse current, the nanosecond electrochemical pulse deposition process can avoid the concentration polarization on the surface of the electrode and reinforce the regioselectivity of the deposition reaction, at the same time, the pulsation effect of the laser can effectively eliminate the hydrogen bubbles in the electro-deposition process so that the localization effect of the electrochemical deposition and the compactness of the material can be obviously increased and the microcomponent deposition formation of the high performance metal material can be realized. The manufacturing method and device provided by the invention is suitable for manufacturing three-dimensional micro devices made of high performance metal materials, belonging to the field of microfine rapid shaping process.

Description

technical field

[0001] The invention relates to the field of micro-rapid prototyping in manufacturing technology, in particular to a micro-manufacturing method and device of optical fiber laser electrochemical space deposition, which is suitable for the production of high-performance metal micro-devices, the production and repair of integrated circuit boards, etc. Space forming processing. Background technique

[0002] At present, electrochemical deposition technology has been widely used in parts repair technology, surface treatment technology, and micro-manufacturing technology. Especially in recent years, with the development of Micro Electromechanical System (MEMS for short), there is an increasing demand for tiny parts and micro-actuators, such as micro-axis, micro-sensor, micro-pump, etc. Some micro-devices even have special requirements for materials, such as micro-magnetic valves, which require materials to have sufficient magnetic energy product, which cannot be po...

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