Radio-frequency single-electron transistor scanning probe and application thereof
A single-electron transistor and scanning probe technology, which is used in the field of radio frequency single-electron transistors to make scanning probes, charge scanning imaging and oscilloscope and atomic force imaging systems, can solve the problem of inability to perform spatial scanning, large mutual influence, and inability to charge problems such as effective signal testing, to achieve the effects of high sensitivity, high charge detection, and wide operating temperature range
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[0021] The invention forms a scanning probe of a radio frequency single electron transistor by integrating a single electron transistor and a radio frequency resonance circuit, and forms a charge scanning imaging and an oscilloscope and an atomic force imaging system supported by a peripheral system.
[0022] The technical solution of the present invention will be further described below with reference to the accompanying drawings and a preferred embodiment.
[0023] like image 3 As shown, the integrated radio frequency single electron transistor scanning probe (RF-SET Scanning Probe) includes an SOI substrate, and a needle-shaped protrusion is formed at one end of the SOI substrate. The SOI is provided with a radio frequency resonance circuit and a single-electron transistor that match each other, wherein the single-electron transistor is integrated on the needle-shaped protrusion of the SOI substrate, and the radio frequency resonance circuit is integrated in the root body ...
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