Device and method for preparing hard carbide ceramic coating based on composite treatment of large-area high-current pulsed electron beam

Abstract

The invention provides a device and a method for preparing a hard carbide ceramic coating based on composite treatment of a large-area high-current pulsed electron beam, and relates to a device and a method for preparing the hard carbide ceramic coating, solving the problem that the conventional large-area high-current pulsed electron beam technology can not be used for ceramic coating treatment because the coating is subjected to arc discharge to be damaged due to charge accumulation effect when performing electronic beam irradiation treatment on the ceramic coating. The device is characterized in that a vacuum pump set is connected with a vacuum chamber; a rotary sample platform is placed in the vacuum chamber; a metal target is placed at one side opposite to the vacuum pump set; a graphite target and an electronic gun are correspondingly arranged; and four heaters are uniformly distributed on an inner wall of the vacuum chamber. The method comprises the following steps: placing a pre-processed component to be processed on the rotary sample platform to be opposite to the graphite target and the metal target; coating N layers of films, and then irradiating by the electronic gun; and heating by the heater to execute returns processing; and then maintaining the temperature and cooling, thus accomplishing the preparation. The device and method are applicable to the field of material surface treatment.

Description

technical field

[0001] The invention relates to a device for preparing a hard carbide ceramic coating and a preparation method thereof. Background technique

[0002] Large-area high-current pulsed electron beam is an emerging material surface modification technology. Its principle is to generate a beam of pulsed electron beam with extremely high energy density through an electron gun to bombard the surface of the material, so that the surface of the material undergoes instant melting and rapid solidification, and the surface is obtained. Fine-grain structure or non-equilibrium metastable phase can realize the change of material surface properties. At the same time, it can also be combined with vacuum coating technology to achieve material surface alloying. Since the substrate and the alloy coating melt simultaneously during the alloying process, the metallurgical bond between the alloyed layer and the substrate is formed, which completely solves the problem of the bonding f...

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