The invention relates to the technical field of purification of anhydrous hydrogen fluoride, in particular to a purification process for high-purity anhydrous hydrogen fluoride. The purification process comprises the following steps: 1, pre-condensation of raw materials; 2, preparation of fluorine by electrolysis; 3, oxidization with fluorine gas; 4, removal of light components; 5, preliminary separation; 6, a circular reaction; 6, a circular reaction; 7, rectification separation; and 8, storage of a finished product. The process has the beneficial effects that by arranging continuous purification equipment, technological process is simple, equipment is few, production cost is low, the purpose of continuous production can be achieved, large-batch production is convenient to achieve, and production and purification efficiency is greatly improved; by arranging separation processes such as electrolysis, the circular reaction and rectification, product separation precision is greatly improved, product purity is greatly improved on the premise of reducing introduced new impurities, and product quality is improved.