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Test system of semiconductor micro-nano monocrystal gas sensor

A gas sensor and test system technology, applied in the field of simple, stable and reliable test systems, to achieve real-time signal transmission, simplify the manufacturing process, and realize the effect of signal transmission

Inactive Publication Date: 2013-04-17
NORTHEAST NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to realize the gas-sensing test of semiconductor micro-nano single crystal components under high-precision conditions, the present invention provides a simple and reliable testing system to solve the shortcomings of existing dynamic testing devices for gas-sensing components, and to realize The measurement of various gases by semiconductor micro-nano single crystal components improves the accuracy of test results and the sensitivity of device response

Method used

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  • Test system of semiconductor micro-nano monocrystal gas sensor
  • Test system of semiconductor micro-nano monocrystal gas sensor
  • Test system of semiconductor micro-nano monocrystal gas sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] 1. The prepared SnO 2 The single crystal nanoribbon field effect transistor is packaged on the chip base 3;

[0028] 2. Insert the pins of the chip base 3 into the test chip conversion seat 4;

[0029] 3. Connect the DuPont line connected to the external signal output port 8 with the pin on the pin header 2, requiring SnO 2 The corresponding pins of each electrode of the nanoribbon field-effect crystal are connected;

[0030] 4. Fix the connected components in the test cavity 5 with quick-connect flanges;

[0031] 5. Connect each part of the test chamber with the semiconductor electrical test system 9, the air intake system 10, the gas flow monitoring and component control unit 11, and the exhaust gas recovery system 12;

[0032] 6. Connect the external signal output port 8 with the supporting aviation connector of the semiconductor electrical performance testing system;

[0033] 7. Access to N 2 Into the test chamber, after the test system is stable, pass t...

Embodiment 2

[0038] Steps 1 to 7 refer to steps 1 to 7 of Example 1

[0039] 8. Feed 50ppb SO 2 Carry out a test, and then pass in 80ppb and 100ppb SO in turn after the response is stable 2 , test results refer to image 3

[0040] 9. It can be seen from the test results that this test platform can well test the gas-sensing performance of semiconductor micro-nano single crystal devices, shield the influence of external factors on the test system, and at the same time have high sensitivity for low-concentration testing of the gas to be tested .

[0041]

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Abstract

The invention relates to the technical field of test of gas sensors, in particular to a simple, stable and reliable test system for a semiconductor micro-nano monocrystal. The test system mainly comprises an IC circuit board, pin headers, a test chip base, a test chip conversion seat, a test cavity, a blind plate matched with the test cavity, fasteners, fixing supports, external signal output ports, a gas intake system, a gas flow rate monitoring and component regulating and controlling unit, a tail gas recovering system and a semiconductor electrical test system. The invention provides a method for gas sensitivity test of semiconductor micro-nano monocrystal elements, requires a simple structure, is convenient and practical and high in working efficiency and can meet the requirement for low-pressure gas sensitivity test.

Description

technical field [0001] The invention relates to the technical field of gas sensor testing, in particular to a simple, stable and reliable testing system for semiconductor micro-nano single crystals. Background technique [0002] With the development of modern science and technology and the progress of human society, on the one hand, while human beings have created huge wealth, on the other hand, they have brought serious pollution to the ecological environment and living environment. A series of problems caused by these pollutions, such as the greenhouse effect, acid rain, and the destruction of the ozone layer, cannot be ignored. Therefore, it is an urgent need to quickly and accurately detect these toxic and harmful gases. It is under such a background that the gas sensor has been developed rapidly. [0003] Among many gas sensors, semiconductor gas sensors have been widely concerned and researched due to their advantages of low cost, long life and low sensitivity to humi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00G01R31/26
Inventor 汤庆鑫童艳红蔡彬塔利哈尔裴腾飞
Owner NORTHEAST NORMAL UNIVERSITY
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