Production process of molybdenum-niobium alloy target
A technology of molybdenum-niobium alloy and production process, which is applied in the field of production process of molybdenum-niobium alloy target material, can solve the problems of high compacted porosity, low plate density, low compacted density, etc., and achieve the effect of simple process flow
Active Publication Date: 2018-02-23
江西科泰新材料有限公司
View PDF8 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
After ordinary isostatic pressing, due to the limitation of the maximum pressing pressure, the density of the green compact is low, and due to the high porosity of the green compact, the density of the plate after sintering is low. Production requirements for molybdenum-niobium alloy plates for shooting targets
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreExamples
Experimental program
Comparison scheme
Effect test
Embodiment l
[0014] A production process of molybdenum-niobium alloy target material. High-purity molybdenum powder and niobium powder are mixed uniformly in a blender. The niobium powder and molybdenum powder are placed in the blender in a weight ratio of 1:8-9. The molybdenum-niobium alloy is calcined in a high temperature vacuum calcining furnace at 1400~1900℃. The agglomerate is crushed into small pieces with a hydraulic press and then ground in an agate ball mill under the protection of helium gas. The grinding ball ratio is 1 / 3, and the fine powder with a revolution of 600 is pressed into a vacuum pressure sintering device at a pressure of 12-25 MPa and pressed at 1450-2020°C for 30-90 minutes to obtain a target blank. Finish the target material on the grinder.
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
| Property | Measurement | Unit |
|---|---|---|
| crystal size | aaaaa | aaaaa |
Login to View More
Abstract
A production process of a molybdenum-niobium alloy target, which is characterized in that high-purity molybdenum powder and niobium powder are evenly mixed in a mixer, and the niobium powder and molybdenum powder are placed in the mixing material according to a weight ratio of 1:8-9 In the machine, the molybdenum-niobium alloy is calcined in a high-temperature vacuum calciner at 1400-1900°C, and the sintered block is broken into small pieces by a hydraulic press, and then ground in an agate ball mill under the protection of helium. The proportion of grinding balls is 1 / 3, and the fine powder with a revolution of 600 is pressed and formed in a vacuum pressure sintering device with a pressure of 12-25 MPa and pressed at 1450-2020°C for 30-90 minutes to obtain a target blank. Trim on a grinder to obtain a finished target. The method of the invention has a simple technological process and is easy to realize industrialized production. No pollution, the preparation process will not produce any waste, waste acid and other pollutants.
Description
Technical field [0001] The invention belongs to the technical field of molybdenum-niobium alloy preparation, and specifically relates to a production process of molybdenum-niobium alloy target materials. Background technique [0002] Mo-Nb (Mo-Nb) alloy has excellent properties such as high melting point, high high temperature strength and corrosion resistance, and is an important high temperature structural material. Molybdenum-niobium alloys have broad application prospects in high-tech fields such as aerospace, aviation, nuclear industry, weapons, electronics, and medicine. The molybdenum-niobium alloy target is the basic raw material for plating molybdenum-niobium alloy onto the substrate by ion sputtering. Since molybdenum-niobium alloys belong to replacement solid solution alloys, it is difficult to sinter and compact. After ordinary isostatic pressing is used, the density of the compact is lower due to the maximum pressing pressure, and the density of the sintered plate ...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34B22F9/04C22C1/04B22F3/14
Inventor 吴文斌
Owner 江西科泰新材料有限公司