Low-temperature and low-damage multifunctional composite coating device and method

Abstract

The invention belongs to the field of film preparation, in particular to a low-temperature and low-damage multifunctional composite coating device and a method. The device comprises a vacuum cavity which comprises two groups of four rectangular nonequilibrium magnetic control targets, an ion source and a workpiece rotating stand. The two groups of nonequilibrium targets are placed side by side; the two targets in each group are placed face to face, and can work independently or simultaneously, distances among the targets are adjustable; angles among the targets are adjustable; the targets are driven by a direct current power supply; and plasma is generated between the targets in each group. The workpiece rotating stand is positioned between the two groups of targets, and the ion source is positioned on the side face of one group of targets for ion cleaning and auxiliary deposition. With the adoption of the device and the method, damages to organic materials such as polymers and temperature rise caused by secondary electrons, oxygen anions and the like can be shielded, and films can be uniformly deposited on the surfaces of the organic materials such as the polymers in a low-temperature, low-damage and high-speed manner through the low-temperature linear ion source auxiliary deposition.

Description

technical field [0001] The invention belongs to the field of thin film preparation, in particular to a low-temperature low-damage multifunctional composite coating device and method. Background technique [0002] Due to the advantages of faster response speed, less energy consumption, higher brightness and manufacturability, transparent organic optoelectronic devices have been used in new flat panel displays, solid-state lighting, flexible displays, high-density information transmission and storage, new energy And photochemical utilization and other fields have shown broad application prospects. In these transparent organic optoelectronic devices, it is usually necessary to sputter-deposit a transparent conductive oxide thin film material on the organic material layer as the cathode, but in the traditional magnetron sputtering technology, since the target is parallel to the organic material substrate, the plasma is in the target Between the substrate and the organic materia...

AI Technical Summary

Problems solved by technology

In these transparent organic optoelectronic devices, it is usually necessary to sputter-deposit a transparent conductive oxide thin film material on the organic material layer as the cathode, but in the traditional magnetron sputtering technology, since the target is parallel to the organic material substrate, the plasma is in the target Between the substrate and the organic material substrate, energetic particles with certain energy such as reflective atoms (argon atoms, oxygen atoms), sputtered atoms, secondary electrons and oxygen negative ions directly bombard the organic material substrate, causing damage and temperature rise High; in addition, the thermal radiation and ultraviolet radiation of the plasma will also cause a certain degree of damage and temperature rise

During this deposition process, the damage and temperature rise of organic materials will directly affect the performance and life of transparent organic optoelectronic devices.

At the same time, traditional rigid displays can no longer meet people's needs for display functions. Flexible displays have the characteristics of lightness, thinness, impact resistance, flexibility, and are not limited by occasions and spaces. However, the thermal conductivity of flexible materials is low, and the surface temperature Easy to rise, which limits the large-scale application of flexible devices

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