Single-layer graphene nanopore structure for detection of base sequence and preparation method thereof

Abstract

The invention provides a single-layer graphene nanopore structure for the detection of a base sequence and a preparation method thereof. The preparation method comprises the following steps of shifting a graphene microchip onto the surface of a silicon oxide insulation layer supported by a semiconductor layer, preparing a metal micro electrode on the upper surfaces of two end surfaces of the graphene microchip, then preparing an insulation layer so as to cover the surfaces of the graphene microchip and the metal micro electrode to form a sandwich structure, finally realizing the penetration of the silicon oxide insulation layer, the graphene microchip and the insulation layer through releasing the semiconductor layer and preparing the nanopore. When basic group penetrates through the nanopore, a basic group electrical signal is identified and detected so as to realize the identification of the base sequence. The single-layer graphene nanopore structure has a simple preparation method, has low cost and small structure volume, has better extensibility by being compatible with a CMOS (complementary metal-oxide-semiconductor transistor) technology, and has broader application prospect in biomedical fields.

Description

technical field [0001] The invention belongs to the field of microelectromechanical systems, and relates to a single-layer graphene nanopore structure and a manufacturing method thereof, in particular to a single-layer graphene nanopore structure for base sequence detection and a manufacturing method thereof. Background technique [0002] Biosensors made by microelectronic machining technology have been widely used in the fields of biology and medical treatment. These sensors have the advantages of low cost, mass production, good stability, and high sensitivity. When the size of the object to be measured is nanometer or sub-nanometer level, the sensor must have high sensitivity in order to carry out effective identification and detection. One of the effective ways to improve sensitivity is to reduce the size of the sensor detection element, so that the object to be measured can be detected in the effective time domain and space domain. Therefore, the manufacture of nanomet...

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Problems solved by technology

[0005] Technical problem: In view of the shortcomings of the prior art described above, the object of the present invention is to provide a single-layer graphene nanopore structure for base sequence detection and its manufacturing method, which is used to solve the problem of nano-electrodes in base sequence detection. Excessive size and low sensitivity, while realizing the compatibility of existing technology and COMS technology, can effectively reduce the complexity of the manufacturing process and control the increase in costs

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