Preparation method of compound type metal ceramic substrate provided with circuit and structure thereof
A composite metal and metal substrate technology, applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve the problems of heavy weight, complicated manufacturing process, and time-consuming manufacturing methods of ceramic radiators, so as to avoid thermal resistance effect and reduce The effect of defect rate and process simplification
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[0046] The present invention will be further described below with specific embodiment:
[0047] Please refer to figure 1 , the preparation method of the composite metal-ceramic substrate with circuit of the present invention comprises the following steps:
[0048] a, providing a metal substrate with at least one through hole;
[0049] b. Pre-treatment of the metal substrate, including degreasing, decontamination or rust removal, etc., to remove various substances (including organic substances) and oil stains on the surface of the metal substrate;
[0050] c. Use plasma spraying, spraying or plasma oxidation sintering, and use plasma treatment with different voltage power, current size, and film wave frequency to spray and sputter ceramic materials onto the surface of the metal substrate, and modify the changes in electric power and frequency so that The ceramic on the surface of the metal substrate is even and flat, so that the thickness of the ceramic layer is controlled; ...
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Abstract
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