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High-resolution electron energy loss spectrometer for energy and momentum two-dimensional analyses

A technology of electron energy loss and electron energy analysis, applied in instruments, measuring devices, scientific instruments, etc., to achieve the effects of high detection efficiency, improved detection efficiency, and high-precision data acquisition performance

Active Publication Date: 2015-06-03
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] According to the literature search, there are no related academic papers and patent documents publicly reported in the world and domestically on a high-resolution reflective low-energy electron energy loss spectrometer with energy and momentum two-dimensional analysis functions

Method used

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  • High-resolution electron energy loss spectrometer for energy and momentum two-dimensional analyses
  • High-resolution electron energy loss spectrometer for energy and momentum two-dimensional analyses
  • High-resolution electron energy loss spectrometer for energy and momentum two-dimensional analyses

Examples

Experimental program
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Effect test

Embodiment 1

[0056] refer to Figure 4 , this type of spectrometer includes the following devices: (1) low-energy electron excitation source system, mainly composed of hot cathode LaB 6 Filament 6, filament lens group 7, slit 8, pre-stage fan-shaped monochromator 9, slit 10, fan-shaped monochromator 11, exit slit 12, high-precision electron source rotating platform 5, etc. (2) Angle resolution mode exit lens unit 2 is mainly composed of a first electrode 2-1, a second electrode 2-2, a third electrode 2-3 and the like. (3) Angle-resolved electronic energy analyzer, mainly including electronic receiver, angle-resolved lens group 13, analyzer incident slit 14, hemispherical energy analyzer 15 and so on. (4) Signal receiving and data acquisition system, including microchannel plate electron multiplier (MCP) 16 or DLD, charge-coupled device (CCD) 17 and data acquisition system 18 .

[0057] The electron beam that exits from fan-shaped monochromator 11, exit slit 12 has approximately rectangul...

Embodiment 2

[0071] refer to Figure 5 , this type of spectrometer includes the following devices: (1) low-energy electron excitation source system, mainly composed of GaAs photocathode 19, pulsed laser 23, 90° fan-shaped monochromator 20, 180° fan-shaped monochromator 21, exit lens system 2, etc. Composition; (2) tube lens type angle-resolved electron energy analyzer 22; (3) signal receiving and data acquisition system, including microchannel plate electron multiplier (MCP) 16 or DLD, charge-coupled device (CCD) 17 and data acquisition System 18.

[0072] Its working process: (1) pulsed laser 23 sends a pulsed laser light and strikes on the GaAs photocathode 19, and GaAs 19 emits photoelectrons with the same starting time, and the photoelectrons enter the 90° fan-shaped monochromator 20 and the 180° fan-shaped monochromator 21 , under the joint action of the monochromator and the corresponding slit, the energy monochromatization and beam spot shape of the electron beam will be optimized,...

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Abstract

The invention provides an electron energy loss spectrometer for energy and momentum two-dimensional analyses and solves problems of high resolution and high signal intensity matching between an electron-beam source and an angle-resolution electron energy analyzer. The electron energy loss spectrometer comprises a flexible electron-beam source, an angle-resolution mode lens, an angle-resolution electron energy analyzer and the like. The angle-resolution electron energy analyzer can be used for analyzing a low-energy inelastic scattering electron beam of EELS (electron energy loss spectroscopy), flexibility and good monochromatization capability of the electron source, good parallel convergence capability to the electron beam of an angle-resolution mode lens system and the energy and momentum dual analytic capability of the angle-resolution electron energy analyzer are combined together, the momentum and the energy two-dimensional analyses of inelastic scattering electrons can be performed synchronously, and the electron energy loss spectrometer can be acquired, so that a measurement method is provided for accurately measuring complete information excited by surface elements.

Description

technical field [0001] The invention belongs to the design field of electronic spectrometers, and more specifically relates to a high-resolution electron energy loss spectrometer with energy and momentum two-dimensional analysis functions. Background technique [0002] It is one of the important topics in surface physics to study the properties of various elementary excitations on the surface of solid materials. Among them, how to analyze the role of electron-phonon interaction in a variety of novel materials (high-temperature superconductors, graphene, oxides, etc.) is an important task in the field of condensed matter physics. Among the techniques for measuring surface element excitation, high-resolution electron energy loss spectroscopy (HREELS, High-Resolution Electron Energy Loss Spectroscopy) is an important, effective and irreplaceable surface analysis technique. Theoretically, the meta-excitation itself can be completely described by the two parameters of energy E (...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/00
Inventor 曹彦伟杨芳郭沁林郭建东
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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