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Method for preparing molybdenum target

A technology of molybdenum target and molybdenum plate, applied in ion implantation plating, metal material coating process, coating, etc., can solve the problems of reducing, reducing C content, and not effectively reducing the content of impurity elements, etc., to achieve high surface quality, Effect of improving purity, ensuring purity and product quality

Active Publication Date: 2013-06-05
JINDUICHENG MOLYBDENUM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The usual powder metallurgy method cannot effectively reduce the content of most impurity elements in the raw material powder: for example, the usual powder metallurgy process is difficult to reduce the O in the material to below 30ppm; the usual powder metallurgy process cannot reduce the Fe, Si in the material , Cr, Ca, K, Mg, Ti, Ni and other elements are reduced to below 20ppm
The electron beam smelting process is an effective method for purifying materials, but the residual C in metals or ceramics often exists in the form of graphite, and the electron beam smelting method for preparing high-purity metals cannot effectively reduce the C content

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Step 1. Use molybdenum powder with a mass purity of 99.95% (O content is not included) as raw material. The impurity content in the raw material is shown in Table 1. Put 35 kg of molybdenum powder into a rectangular rubber mold and seal it. The rubber mold of the molybdenum powder is put into a cold isostatic press, and pressed at 200MPa for 10 minutes to obtain a molybdenum billet; then the molybdenum billet is placed in a high-temperature furnace, and the -2 Pre-sintering is carried out under the condition of Pa, and the pre-sintered billet is obtained after cooling with the furnace; the process of the pre-sintering is: heating the high-temperature furnace to 900°C and then keeping it for 10h, then continuing to heat up to 1100°C, then keeping it for 10h, and then continuing to heat up to After 1600°C, keep warm for 8 hours, and the rate of temperature rise is 10°C / s;

[0030] Step 2. Place the pre-sintered compact described in step 1 in a high-temperature furnace, an...

Embodiment 2

[0036] Step 1. Use molybdenum powder with a mass purity of 99.95% (O content is not included) as raw material. The impurity content in the raw material is shown in Table 1. Put 50 kg of molybdenum powder into a rectangular rubber mold and seal it. The rubber mold of the molybdenum powder is put into a cold isostatic press, and pressed at 250MPa for 10 minutes to obtain a molybdenum billet; then the molybdenum billet is placed in a high-temperature furnace under a pressure of 2×10 -2 Pre-sintering is carried out under the condition of Pa, and the pre-sintered billet is obtained after cooling with the furnace; the process of the pre-sintering is: heating the high-temperature furnace to 1000°C and then keeping it for 2 hours, then continuing to heat up to 1200°C, then keeping it for 2 hours, and then continuing to heat up to After 1500°C, keep warm for 6 hours, and the rate of temperature increase is 20°C / s;

[0037] Step 2. Place the pre-sintered compact described in step 1 in a...

Embodiment 3

[0043] Step 1. Use molybdenum powder with a mass purity of 99.95% (O content is not included) as raw material. The impurity content in the raw material is shown in Table 1. Put 50 kg of molybdenum powder into a rectangular rubber mold and seal it. The rubber mold of the molybdenum powder is put into a cold isostatic press, and pressed at 250MPa for 10 minutes to obtain a molybdenum billet; then the molybdenum billet is placed in a high-temperature furnace, and the molybdenum billet is -3 Pre-sintering is carried out under the condition of Pa, and the pre-sintered billet is obtained after cooling with the furnace; the process of the pre-sintering is: heat the high-temperature furnace to 1100°C and keep it for 0.5h, then continue to heat up to 1500°C and keep it for 0.5h, and then continue After heating up to 2000°C, keep warm for 20 hours, and the heating rate is 1°C / s;

[0044] Step 2. Place the pre-sintered compact described in step 1 in a high-temperature furnace, and sinter...

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Abstract

The invention discloses a method for preparing a molybdenum target. The method comprises the following steps of: (1) compacting molybdenum powder into a molybdenum blank material, and pre-sintering the molybdenum blank material in a high-temperature furnace so as to obtain a pre-sintered blank; (2) sintering the pre-sintered blank in a high-temperature furnace so as to obtain a high-purity molybdenum metal blank; (3) heating the high-purity molybdenum metal blank in a muffle furnace, and carrying out pressure processing on the heated high-purity molybdenum metal blank so as to obtain a molybdenum plate; (4) heating the molybdenum plate, cooling and then machining; and (5) cleaning the machined molybdenum plate, and then binding the molybdenum plate to a metallic back plate, thereby obtaining the molybdenum target. According to the method, the pre-sintering is carried out under low pressure, so that the melting point of impurities can be lowered, the conditions for impurity volatilization are created, and the removal of gas elements and low-melting-point impurities from the material is favored; and particularly, the content of impurity elements, such as C, O, Si, Cr, Ca, K, Mg, Ti and Ni, in the material is reduced, so that the purity of the finished products is remarkably improved, and the purity and product quality of molybdenum-sputtered target materials are guaranteed.

Description

technical field [0001] The invention belongs to the technical field of molybdenum sputtering target preparation, and in particular relates to a method for preparing a molybdenum target. Background technique [0002] In the electronics and solar industries, molybdenum metal is sputtered onto metal or non-metal surfaces by magnetron sputtering and used as electrodes. [0003] For example, in the flat-panel display equipment manufacturing industry, the display is realized by using two glass sheets that are vacuum-isolated. The glass placed on the back is used as the cathode of the display. On this piece of glass, hundreds of millions of emitter tips are distributed in the form of a field emitter array. This emitter tip is made of molybdenum, and the pixels displayed are much higher than the traditional TV screen. The flat panel display process uses magnetron sputtering to deposit molybdenum on the tip of the emitter. This technology is of great significance for the future dev...

Claims

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Application Information

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IPC IPC(8): C23C14/34
Inventor 王林朱琦杨秦莉王娜
Owner JINDUICHENG MOLYBDENUM CO LTD
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