All-solid-state short wave ultraviolet laser source

Abstract

The invention discloses an all-solid-state short wave ultraviolet laser source which comprises a near-infrared base frequency laser, a second harmonic frequency non-linear optical crystal, a light beam matching regulator control system, a fourth harmonic frequency non-linear optical crystal and a light beam splitting collimation reshaping system, wherein the second harmonic frequency non-linear optical crystal, the light beam matching regulator control system, the fourth harmonic frequency non-linear optical crystal and the light beam splitting collimation reshaping system are sequentially arranged along the laser output direction of the near-infrared base frequency laser. The near-infrared base frequency laser outputs a near-infrared laser, a second harmonic frequency laser is generated through the second harmonic frequency non-linear optical crystal and enters the fourth harmonic frequency non-linear optical crystal through the light beam matching regulator control system, a high-efficiency fourth harmonic frequency laser is generated, and output of a short wave ultraviolet laser with high power and high light beam quality is achieved through the light beam splitting collimation reshaping system. According to the all-solid-state short wave ultraviolet laser source, output of the high-efficiency near-infrared base frequency laser is achieved through precise wavelength choice technology and low-gain laser oscillation amplification technology, output of the high-efficiency second harmonic frequency laser is achieved through the non-linear optical crystal, then generation of the high-efficiency fourth harmonic frequency laser is achieved through the non-linear optical crystal, and therefore the output of the short wave ultraviolet laser with the high power and the high light beam quality is achieved.

Description

technical field [0001] The invention relates to an all-solid-state laser, in particular to a practical all-solid-state short-wave ultraviolet laser with high power and high beam quality. Background technique [0002] Short-wave ultraviolet laser refers to ultraviolet laser with a wavelength between 200nm and 300nm. It has many advantages such as short wavelength, high photon energy, easy absorption by materials, and special wave band. It has great application value in the fields of laser fine processing, cutting-edge science, and national security. . [0003] All-solid-state lasers (semiconductor laser-pumped solid-state lasers, DPL for short) have the advantages of small size, long life, high efficiency, high beam quality, good stability, high reliability, convenient maintenance, and no pollution due to electric drive. An important direction of development, the use of DPL harmonic technology to achieve short-wave ultraviolet laser output is the most effective way to develo...

AI Technical Summary

Problems solved by technology

However, for a long time, it has not been applied to the short-wave ultraviolet band (CBO crystal frequency doubling matching cut-off wavelength is 273nm) because it cannot be directly frequency-multiplied and matched to the quadruple frequency of the existing 1064nm fundamental frequency laser.

LBO crystal has a very high damage threshold and is currently the most frequently used commercial nonlinear crystal with excellent comprehensive performance. However, it is also unable to directly double the frequency to match the quadruple frequency of the existing 1064nm fundamental frequency laser, so it cannot Applied to the short-wave ultraviolet band (LBO crystal frequency doubling matching cut-off wavelength is 277nm)

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