High-purity SiCl4 purification method
A purification method and high-purity technology, applied in the direction of silicon halide compounds, halosilanes, etc., can solve the problems such as difficult separation of azeotrope impurities, achieve the effect of eliminating particle dust, eliminating polluted products, and overcoming poor strength
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[0035] Embodiment 1: High-purity SiCl in this embodiment 4 The purification method is as follows:
[0036] First, the coarse SiCl 4 , cuprous chloride or zinc chloride and inorganic salts are added to the reaction kettle, and the crude SiCl 4 The azeotrope and the inorganic salt are reacted under the catalysis of cuprous chloride or zinc chloride for 20-60min, and the inorganic salt is Na 2 CO 3 or K 2 CO 3 , the dosage of cuprous chloride or zinc chloride is crude SiCl 4 0.01%-0.1% of the mass, the amount of inorganic salt added is based on crude SiCl 4 The azeotrope content is determined to be 100.1%-102% of the azeotrope mass, and the reaction obtains a high boiling point mixture;
[0037] 2. The product of step 1 is pumped into the atmospheric rectification tower 1 through a shield pump, the heavy components are discharged from the tower still, and the light components are discharged from the top of the column, SiCl 4 The crude rectification product is extracted fr...
Example Embodiment
[0042] Embodiment 2: The difference between this embodiment and Embodiment 1 is that the adsorbent filled in the adsorption column described in step 3 is silica gel modified by silane coupling agent γ-chloropropyl-triethoxysilane , Silane coupling agent γ-chloropropyl-trimethoxysilane modified silica gel, silane coupling agent γ-chloropropyl-dimethoxyethoxysilane modified silica gel or silane coupling agent γ-chlorine Propyl-methoxydiethoxysilane-modified silica gel. Others are the same as the first embodiment.
Example Embodiment
[0043] Embodiment 3: The difference between this embodiment and Embodiment 1 or Embodiment 2 is that the degree of vacuum described in Step 5 is -0.03MPa. Others are different from one of Embodiments 1 or 2.
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