A preparation method of ultraviolet detector based on fluorescent coating integrating sphere

Abstract

The invention relates to an ultraviolet detector preparation method based on a fluorescence coating integrating sphere. The ultraviolet detector preparation method comprises the steps of polishing the inner surface of an integrating sphere body, and enabling an inner wall of the integrating sphere body to be coated evenly with a layer of fluorescence film in a vacuum or rotating coating mode; opening a groove at the bottom of an integrating hemisphere, enabling a silicon substrate detector to be embedded in the groove to serve as an ultraviolet light signal receiver, opening a hole on a combined round edge of the two integrating hemispheres to enable the hole to serve as an incidence hole; and due to the fact the emission wavelength of the fluorescence film is within a sensitive band of the silicon substrate detector, enabling the ultraviolet light to be instantly received by the silicon substrate detector after the ultraviolet light is reflected for many times through the inner surface of the integrating sphere, so that sensitive response of the silicon substrate detector to ultraviolet signals is achieved. A protecting glass window or the photosensitive surface of a silicon substrate imaging device does not need to be coated with a film, damage of the device caused by window removal operation of the detector is avoided; simultaneously, on the basis of repeated excitation luminescence for ultraviolet light reflection inside the integrating sphere, fluorescence efficiency and total energy are greatly improved, precise detection of the ultraviolet light is achieved conveniently, effect is good, and the cost is low.

Description

technical field [0001] The invention relates to an ultraviolet detection technology, in particular to a preparation method of an ultraviolet detector based on a fluorescent coating integrating sphere. Background technique [0002] Ultraviolet detection technology is an important photoelectric detection technology. Its application has penetrated into many fields such as military exercises, astronomical detection, environmental monitoring, and medical biological analysis, and has had a profound impact on modern national defense and people's lives. The imaging devices in the detector, such as CCD, CMOS, etc., generally can only detect two regions of the visible band and the infrared band, but their response in the ultraviolet band is very weak. This is because the penetration depth of UV light in polysilicon is very small (<2nm). Ever since CCDs and other photodetectors became commercially available, efforts have been devoted to finding a way to increase the sensitivity of ...

AI Technical Summary

Problems solved by technology

[0003] Aiming at the problem of poor sensitivity of the detector to the ultraviolet band, the present invention proposes a method for preparing an ultraviolet detector based on a fluorescent-coated integrating sphere. The fluorescent film is directly plated on the inner wall of the integrating sphere, which not only overcomes the detector’s photosensitive Process problems of the surface coating, and the thin film affects the sensitivity, resolution and poor response inhomogeneity of the device itself

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