High-frequency three-dimensional Shack-Hartmann wavefront measuring device and its measuring method

Abstract

A high-frequency Shack-Hartmann wave-front measuring device is composed of microlens arrays and optical fiber bundles. The high-frequency Shack-Hartmann wave-front measuring device is characterized in that a high-frequency laser device, a beam splitter, a collimator lens and an interference filter are arranged in front of a high-frequency Shack-Hartmann wave-front measuring device body sequentially; Geiger avalanche photodiode arrays and a system control unit are arranged at the back of the high-frequency Shack-Hartmann wave-front measuring device body; the output of the Geiger avalanche photodiode arrays is connected with the system control unit. A GM_APDsarray is adopted as a detecting core, wave-front error measurement of a target to be detected is realized by the photon counting inversion method, high frequency and high sensitivity features of the GM_APDsarray is utilized, so that the measuring device has the advantages of short measuring intervals, high accuracy in single measurement, influence on measuring accuracy by environment changes can be reduced effectively, and the high-frequency Shack-Hartmann wave-front measuring device is particularly adaptable to adaptive optical atmospheric wavefront error stratifying measurement.

Description

technical field [0001] The invention relates to a high-frequency three-dimensional Shack Hartmann wavefront measurement device and a measurement method based on a Geiger avalanche photodiode array (GM_APDsarray). It belongs to the field of optical measurement technology. The present invention is funded by the National Natural Science Foundation of China (project approval number: 11273040). Background technique [0002] Shack Hartmann is a common wavefront error measurement device, which is widely used in optical testing and astronomical telescope assembly. It is used for atmospheric wavefront error measurement in adaptive optics, which plays an important role in improving telescope imaging quality. effect. Shack Hartmann uses a microlens array to divide the entrance pupil into a certain number of sub-apertures, and the incident wavefront error will cause the change of the focal spot in the sub-aperture. The slope of the incident wavefront of each sub-aperture, and finally...

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Problems solved by technology

[0008] The purpose of the present invention is to address the shortcomings of the existing Shaker-Hartmann wavefront sensor with poor time response characteristics and low measurement frequency, and proposes a high-frequency three-dimensional Shaker based on the Geiger Avalanche Photodiode Array (GM_APDsarray) detection core. Hartmann wavefront measurement device

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