Thin-film pressure sensor adopting titanium oxynitride as strain material and manufacturing method thereof

Abstract

The invention aims at disclosing a thin-film pressure sensor adopting titanium oxynitride as a strain material and a manufacturing method thereof. The thin-film pressure sensor comprises a stainless-steel elastic substrate, wherein the stainless-steel elastic substrate is provided with a core body thin-film layer; the core body thin-film layer comprises an insulating layer, a strain resistance layer, an electrode, a temperature-measuring resistance layer and a passivating layer; and the insulating layer, the strain resistance layer, the electrode, the temperature-measuring resistance layer and the passivating layer are deposited on the stainless-steel elastic substrate by a vacuum deposition method. Compared with the prior art, the invention has the advantages that a core body of the thin-film pressure sensor prepared by using thin film as the strain resistance layer has good heat stability, low cost and high production efficiency, measurement of temperature and pressure parameters can be realized simultaneously, the core body is suitable for use under high-temperature and severe environments, and the purpose of the invention is achieved.

Description

technical field [0001] The invention relates to a thin-film pressure sensor and a manufacturing method thereof, in particular to a thin-film pressure sensor using titanium oxynitride as a strain material and a manufacturing method thereof. Background technique [0002] With the rapid development of modern technology, such as the pressure measurement of the launch vehicle fuel chamber, the downhole pressure measurement of the petroleum industry, and the popularization of family cars, pressure sensors that are resistant to high temperature, corrosion, vibration, and can work in harsh environments are required. Since the thin film pressure sensor is made by vacuum deposition or vacuum sputtering, it can meet the use in harsh environments, so it has been greatly developed. [0003] At present, the strain material used in the core of the thin film pressure sensor is mainly nickel-chromium alloy, but the nickel-chromium alloy has a large temperature coefficient of resistance, whic...

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Problems solved by technology

[0005] The object of the present invention is to provide a thin-film pressure sensor using titanium oxynitride as the strain material and its manufacturing method, aiming at the deficiencies of the prior art, it solves the problem of the thermal stability of the pressure sensor and realizes the pressure sensor in an environment with large temperature changes. , accurate measurement of pressure parameters and temperature parameters

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