Method and device of cleaning microparticles on surface of metal workpiece with laser shock waves

Abstract

The invention discloses a method and a device of cleaning microparticles on surface of a metal workpiece with laser shock waves. The method comprises the following steps: spraying a layer of deionized water film on the surface of the metal workpiece; adjusting a laser device to allow laser beams to focus in the deionized water film; utilizing the laser shock waves to induce deionized water covered on the surface of the metal workpiece to produce rapidly inflated plasmas, wherein the produced plasma shock waves are applied on the particles on the surface of the metal workpiece directly, so as to separate the particles from the surface of the metal under the co-action of the shock waves and high pressure water flow. Through the adoption of the method and the device, the microparticles on the surface of the metal can be nondestructively and effectively cleaned; the mechanical property of the surface of the metal workpiece can be improved; and the method and the device can be applied to the cleaning of the microparticles on the surface of the metal workpiece.

Description

technical field [0001] The invention belongs to the technical field of laser cleaning, and particularly refers to a kind of rapidly expanding plasma induced by laser shock waves on the deionized water covered on the surface of metal workpieces, and the generated plasma shock waves directly act on the particles on the surface of metal workpieces, so that the particles A method and device for separating metal surfaces under the action of high-pressure water flow. Background technique [0002] Cleaning technology is often used in industrial production, cultural preservation and treatment of dental diseases. For example, during electroplating, phosphating, spraying, welding, packaging and assembly of integrated circuits for industrial products, in order to ensure the quality of the workpiece, it is necessary to remove the grease, dust, rust or residual solvents, adhesives and other dirt attached to the surface of the product. There are a large number of "small advertisements" p...

AI Technical Summary

Problems solved by technology

[0003] Traditional cleaning methods include mechanical cleaning, chemical cleaning and ultrasonic cleaning. Mechanical cleaning has low cleanliness and is easy to damage the surface of the substrate to be cleaned; chemical cleaning is easy to cause environmental pollution, and the cleanliness is limited; The cleaning of sub-micron dirt particles is powerless

[0004] In the prior art, the problem of easy damage and contamination of the substrate in the particle removal method

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