Silicon-based silicon dioxide waveguide, and manufacturing and application methods thereof

Abstract

The invention belongs to the technical field of optical material devices, and particularly relates to a silicon-based silicon dioxide waveguide, and manufacturing and application methods thereof. With the adoption of the silicon-based silicon dioxide waveguide, and the manufacturing and application methods thereof, a waveguide core area space of which the cross section is rectangular is formed through carrying out a photoetching process on silicon dioxide on a silicon base in the waveguide. Specific geometrical parameters are given to a silicon-based silicon dioxide waveguide structure, various all-optical logic devices can be realized, wherein the all-optical logic devices are as follows: an all-optical divider, an all-optical coupler, an all-optical switch, an all-optical logic gate, an all-optical storage and an all-optical router which can be obtained through processing the silicon-based silicon dioxide waveguide with a specific domain structure; furthermore, the application also comprises an all-optical integrated chip and an all-optical network; and a femtosecond pulse light source of which the wavelength range is 270-1100nm is used as a high-speed input signal of the all-optical logic device. The silicon dioxide domain structure adopted by the invention has the advantages of being compatible with a silicon microelectronic process in manufacturing, and being easily popularized and applied to industries.

Description

technical field [0001] The invention belongs to the technical field of optical materials and devices, in particular to a silicon-based silicon dioxide waveguide and its manufacturing and application method. Background technique [0002] The existing materials used in all-off logic devices mainly include photonic crystals, nonlinear bistable materials, nanowires and plasmonic waveguides. The existing problems are that it is expensive, not miniaturized enough, the process is complicated, the S / N ratio is low, the contrast between the logical input and output of the optical signal "1" and "0" is small, and it even needs to be operated in a low temperature environment, so it is difficult to popularize in practical applications. [0003] Silicon material is the cornerstone of the modern microelectronics industry, and its processing technology is mature, making most of the semiconductor chips. [0004] It is a very mature and standard process to generate a thin layer of silicon d...

AI Technical Summary

Problems solved by technology

The existing problems are that it is expensive, not miniaturized enough, the process is complex, the S / N ratio is low, the contrast between the logical input and output of the optical signal "1" and "0" is small, and it even needs to be operated in a low temperature environment, so it is difficult to popularize in practical applications.

[0006] The present invention proposes an all-optical logic device made of a silicon-based silicon dioxide microstructure, utilizes the all-optical switching of this type of waveguide, and particularly relates to the general geometric parameter range of a silicon-based silicon dioxide waveguide for making a fully-closed logic device, which is internationally recognized rarely reported

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