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Film bridge type igniter

A technology of igniter and thin film bridge, which is applied in ignition devices, attack equipment and other directions, can solve the problems affecting the miniaturization of igniter and the large volume of constant current source, so as to improve reliability and stability, enhance oxidation resistance, improve The effect of stability

Inactive Publication Date: 2013-11-20
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the article "Preparation and Characterization of Multilayer Energetic Thin Films" ("Pyrotechnics", 2009(1): 9-11. Authors: Wang Liling, Jiang Xiaohua, He Bi, etc.), a Ti (titanium ) film is the bottom layer and is deposited on the substrate and the surface of the two electrodes, and then deposits B (boron) on the Ti film. In order for the igniter to meet the energy (reaction heat) required for ignition, a larger bridge area is required. A larger bridge area requires a larger ignition current in use. This type of multilayer energetic film The igniter generally needs to use a large current of more than 5A to achieve the purpose of ignition, so the required constant current source is relatively large, which affects the miniaturization of the igniter

Method used

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Embodiment 1

[0011] Embodiment 1: In this embodiment, an igniter of (length×width×thickness) 6mm×3mm×0.5mm is taken as an example, and the magnetron sputtering cavity adopts a conventional multilayer energetic thin film magnetron sputtering cavity; its production The method is:

[0012] Step 1. First, use acetone, alcohol, and deionized water to ultrasonically clean the alumina ceramic substrate 4 with a diameter of 76.2 mm (3 inches); then place the alumina ceramic substrate 4 on the back and vacuum it to 5×10 -4 In the magnetron sputtering chamber below Pa, under the conditions of 17sccm argon gas, 0.5sccm nitrogen gas, the pressure in the vacuum chamber rises to 0.6Pa, the DC power source current is 0.24A, and the voltage is 320V, the Ta target is ignited. And sputtering treatment for 50 minutes, until the thickness of TaN film deposited on the substrate is about 1 μm;

[0013] Step 2. Photolithographic TaN ignition membrane bridge:

[0014] 2.1. Coat photoresist on the substrate afte...

Embodiment 2

[0024] In this embodiment, the Ni / Al multilayer energetic film is used as an example: the processing of the substrate 4, the fabrication method of the TaN ignition membrane bridge and the thin film electrode 1 are all the same as in the embodiment 1 (i.e. steps 1-3);

[0025] Step 4. Place the substrate 4 provided with the TaN ignition membrane bridge 3 and the Al thin film electrode 1 in the magnetron sputtering cavity obtained in step 3, and vacuum 5×10 -4 Below Pa, pass argon 17sccm, oxygen 0.2sccm, adjust the pressure in the vacuum chamber to 0.6Pa, then adjust the current of the Al target DC power to 0.15A, and the voltage to 150V, so that the Al target can react with the TaN ignition film bridge 3 and the surface of the substrate 4 is sputtered for 8 minutes until the thickness of the aluminum oxide film is 100 nm, as an insulating layer;

[0026]Step 5. Using the background technology magnetron sputtering to Al as the bottom Ni / Al multilayer energetic film: on the alumi...

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Abstract

The invention provides a bridge type igniter adopting a multi-layer energetic film, and belongs to the field of initiating explosive device production. The igniter comprises a ceramic substrate, a B / Ti, CuO / Al or Ni / Al multi-layer energetic film, a TaN ignition film bridge arranged between the middle part of the substrate and the multi-layer energetic film, and electrodes arranged on upper surfaces at two sides of the TaN ignition film bridge. According to the igniter, the TaN ignition film bridge especially for the ignition reaction of the energetic film is arranged between the substrate and the multi-layer energetic film, the multi-layer energetic film can be ignited by utilizing the TaN ignition film bridge under the action of ignition current of about 3.0A, so that the multi-layer energetic film can react to produce mass heat to ignite gunpowder, fuel or fire charge. Therefore, the bridge type igniter has the characteristics that the igniter is minimized, small-current electricity is adopted to be matched with a large-area multi-layer energetic film, heat energy required by ignition can be effectively improved by utilizing electric energy and chemical energy, the safety and reliability of ignition can be improved, and the igniter is good in consistence and performance stability, is advantageous to batch production, high in production efficiency, low in cost, and convenient to transport and store.

Description

technical field [0001] The invention belongs to an igniter in the field of pyrotechnics production, in particular to a bridge-type igniter using a multi-layer energetic film. Background technique [0002] Pyrotechnic products such as igniters and detonators are widely used in military and civilian fields such as aviation, aerospace, missile launch, and mine blasting. Explosives are a general term for disposable components and devices that contain gunpowder or explosives and burn or explode after external stimulation to ignite gunpowder, detonate explosives, or perform mechanical work. Electric pyrotechnics are pyrotechnics controlled by electric energy. The igniter is a device that can provide enough energy to ignite gunpowder, fuel or detonate explosives in an instant, and the bridge igniter is an electric igniter. The conventional metal bridge wire igniter has the advantages of simple structure and easy implementation, but it needs manual assembly, and the surface of the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C06C9/00
Inventor 蒋洪川蔡贤耀张万里张宇新邓新武
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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