Equipment for preparing trichlorosilane

A technology for trichlorosilane and equipment, applied in the field of equipment for preparing trichlorosilane, can solve problems such as the preparation process and equipment of trichlorosilane needing to be improved, and achieve the effects of improving efficiency, reducing production cost and improving efficiency

Active Publication Date: 2013-12-18
CHINA ENFI ENGINEERING CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the preparation process and equipment...

Method used

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  • Equipment for preparing trichlorosilane
  • Equipment for preparing trichlorosilane
  • Equipment for preparing trichlorosilane

Examples

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Embodiment 1

[0118] use Figure 3-Figure 12 device shown, refer to figure 1 with figure 2 According to the flow shown in the present invention, according to the method for preparing polysilicon of the present invention, trichlorosilane is prepared according to the following process steps, and then polysilicon is prepared:

[0119](1) Synthesis step of hydrochlorination: Silicon tetrachloride and hydrogen from the following steps (2) and (3) are mixed in a gas-liquid mixer, then exchange heat with the hydrogenation reactor outlet gas, and enter resistance heating Heating to a certain temperature, the mixed gas directly enters the hydrogenation reactor, the temperature is controlled at 500-550 degrees, the pressure is 1.5-3.5MPa, the ratio of silicon tetrachloride to hydrogen is 1:2-1:5, nickel-based or copper-based Under the action of catalyst, it reacts with silicon powder. After the reaction gas passes through the high-efficiency gas-solid dust collector, it exchanges heat with the ga...

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Abstract

The invention discloses equipment for preparing trichlorosilane. The equipment comprises a hydrochlorination synthesis reaction device, and a first distillation purification device, wherein the hydrochlorination synthesis reaction device is used for carrying out hydrochlorination synthesis reaction on ganister sand, hydrogen and at least one material selected from hydrogen chloride and silicon tetrachloride, so as to obtain a hydrochlorination synthesis reaction product containing the trichlorosilane; the first distillation purification device is used for carrying out first distillation purification treatment on the hydrochlorination synthesis reaction product containing the trichlorosilane, so as to obtain the trichlorosilane and first refined raffinate. By using the equipment, the trichlorosilane can be effectively prepared; the process related to the equipment is simple, safe, energy-saving and environment-friendly, low in cost, and high in purity of produced trichlorosilane; the generated tail gas and waste residue can be recycled, so as to achieve the environmental requirements.

Description

technical field [0001] The invention relates to the technical field of photovoltaic industry, in particular to equipment for preparing trichlorosilane. Background technique [0002] As a renewable and clean energy source, solar energy has attracted global attention, and the technology of using solar energy resources to generate electricity has been considered as the most promising new energy technology in the world today. Therefore, the photovoltaic industry with solar power generation technology as the core has developed rapidly in the early 21st century. As the main raw material of the photovoltaic industry, polysilicon has seen a sharp increase in demand with the rapid development of the photovoltaic industry. Furthermore, the demand for trichlorosilane, the main raw material for the production of polysilicon, has also increased. [0003] However, the preparation process and equipment of trichlorosilane still need to be improved at this stage. Contents of the inventio...

Claims

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Application Information

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IPC IPC(8): C01B33/107
Inventor 张升学万烨严大洲毋克力肖荣辉汤传斌杨永亮
Owner CHINA ENFI ENGINEERING CORPORATION
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