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ITO (Indium Tin Oxide) conducting film for touch screen and preparation method thereof

A technology of touch screen and conductive film, which is applied in the direction of cable/conductor manufacturing, conductive layer on insulating carrier, circuit, etc. It can solve the problems of not meeting production requirements, poor chemical stability, poor transmittance, etc., and achieve low resistivity, Promotes a perfect, high-transmittance effect

Active Publication Date: 2014-01-01
DONGGUAN PINGBO ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The ITO film prepared by the prior art has high resistivity, poor transmittance and poor chemical stability, which cannot meet the production requirements.

Method used

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  • ITO (Indium Tin Oxide) conducting film for touch screen and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] See figure 1 , an ITO conductive film for a touch screen, comprising a resin base 1 and a first ITO layer 2, a second ITO layer 3, a third ITO layer 4 and a fourth ITO layer 5 deposited on the resin base 1 in sequence, the resin base 1 The thickness of the first ITO layer 2 is 8 nanometers, the thickness of the second ITO layer 3 is 6 nanometers, the thickness of the third ITO layer 4 is 4 nanometers and the thickness of the fourth ITO layer 5 is 2 nanometers.

[0048] Wherein, the resin matrix 1 is a polyethylene terephthalate resin matrix.

[0049] A kind of preparation method of ITO conductive film for touch screen, it comprises following preparation steps successively:

[0050] Step A, put the resin matrix into the loading chamber of the magnetron sputtering equipment, and vacuumize after sealing;

[0051] Step B, the resin substrate is heated to 200°C and then transported to the sputtering chamber, and deposited for the first time by magnetron sputtering, and aft...

Embodiment 2

[0074] See figure 1 , an ITO conductive film for a touch screen, comprising a resin base 1 and a first ITO layer 2, a second ITO layer 3, a third ITO layer 4 and a fourth ITO layer 5 deposited on the resin base 1 in sequence, the resin base 1 The thickness of the first ITO layer 2 is 9 nanometers, the thickness of the second ITO layer 3 is 7 nanometers, the thickness of the third ITO layer 4 is 5 nanometers and the thickness of the fourth ITO layer 5 is 3 nanometers.

[0075] Wherein, the resin matrix 1 is a polyethylene terephthalate resin matrix.

[0076] A kind of preparation method of ITO conductive film for touch screen, it comprises following preparation steps successively:

[0077] Step A, put the resin matrix into the loading chamber of the magnetron sputtering equipment, and vacuumize after sealing;

[0078] Step B, the resin substrate is heated to 210°C and transported to the sputtering chamber, and deposited for the first time by magnetron sputtering, and after th...

Embodiment 3

[0101] See figure 1 , an ITO conductive film for a touch screen, comprising a resin base 1 and a first ITO layer 2, a second ITO layer 3, a third ITO layer 4 and a fourth ITO layer 5 deposited on the resin base 1 in sequence, the resin base 1 The thickness of the first ITO layer 2 is 10 nanometers, the thickness of the second ITO layer 3 is 8 nanometers, the thickness of the third ITO layer 4 is 6 nanometers and the thickness of the fourth ITO layer 5 is 4 nanometers.

[0102] Wherein, the resin matrix 1 is a polyethylene terephthalate resin matrix.

[0103] A kind of preparation method of ITO conductive film for touch screen, it comprises following preparation steps successively:

[0104] Step A, put the resin matrix into the loading chamber of the magnetron sputtering equipment, and vacuumize after sealing;

[0105] Step B, the resin substrate is heated to 200°C and then transported to the sputtering chamber, and deposited for the first time by magnetron sputtering, and af...

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Abstract

The invention relates to the technical field of conducting films of touch screens, and particularly relates to an ITO (Indium Tin Oxide) conducting film for a touch screen and a preparation method thereof. The ITO conducting film comprises a resin matrix of 100-150 micrometers, a first ITO layer of 8-10 nanometers, a second ITO layer of 6-8 nanometers, a third ITO layer of 4-6 nanometers and a fourth ITO layer of 2-4 nanometers, wherein the first ITO layer, the second ITO layer, the third ITO layer and the fourth ITO layer are sequentially deposited on the resin matrix. According to the invention, the resin matrix is heated to 200-240 DEG C every time through four layered deposition and four crystallization processes, and the recrystallization temperature 150 DEG C of the ITO layers is achieved, so that the ITO can be subjected to a crystallization process after being deposited every time, and the perfect crystallization of the ITO layer is effectively promoted; in order to reduce the influence of thickness on the crystallization, the thicknesses of the first ITO layer, the second ITO layer, the third ITO layer and the fourth ITO layer are sequentially reduced. In conclusion, the prepared ITO conducting film for the touch screen has the advantages of high transmittance, low resistivity and good chemical stability.

Description

technical field [0001] The invention relates to the technical field of touch screen conductive films, in particular to an ITO conductive film for a touch screen and a preparation method thereof. Background technique [0002] The touch screen is an input device that significantly improves the man-machine interface, and has the advantages of intuition, simplicity and speed. Touch screens have been widely used in many electronic products, such as mobile phones, PDAs, multimedia, public information inquiry systems, and the like. ITO conductive film is commonly used in touch screen production. ITO conductive film refers to a high-tech product obtained by sputtering transparent indium tin oxide (ITO) conductive film coating on transparent organic film materials by magnetron sputtering. ITO (Indium Tin Oxides, Indium Tin Metal Oxide), as a typical N-type oxide semiconductor, is widely used in mobile phones, MP3, MP4, digital cameras and other fields. [0003] There are many ways...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01B5/14H01B1/08H01B13/00
Inventor 李林波
Owner DONGGUAN PINGBO ELECTRONICS
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