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Method for measuring total concentration of acidic substances, concentration meter for measuring total concentration of acidic substances, and sulfuric acid electrolysis device equipped with same

A measurement method, sulfuric acid electrolysis technology, applied in the direction of measuring device, chemical method analysis, color/spectral characteristic measurement, etc., can solve the problems of complex measurement/quantification operation, complex structure, expensive equipment, etc., achieve small and cheap production, reduce Effects that make up the instrument

Inactive Publication Date: 2014-01-08
DE NORA PERMELEC LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the qualitative / quantitative method using laser Raman spectroscopy described in Non-Patent Document 1, since each component is qualitatively / quantitatively performed separately, the wavenumber of each component needs to be measured separately. Concentration conversion complicates measurement / quantification operations
In addition, due to the complicated structure, there is a difficulty that the equipment becomes expensive

Method used

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  • Method for measuring total concentration of acidic substances, concentration meter for measuring total concentration of acidic substances, and sulfuric acid electrolysis device equipped with same
  • Method for measuring total concentration of acidic substances, concentration meter for measuring total concentration of acidic substances, and sulfuric acid electrolysis device equipped with same
  • Method for measuring total concentration of acidic substances, concentration meter for measuring total concentration of acidic substances, and sulfuric acid electrolysis device equipped with same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0148] Take 712g of 98% sulfuric acid (manufactured by Kanto Chemical Co., Ltd.) according to the above formula (4) in a 1L volumetric flask, add ultrapure water to dilute to a total of 1L, and prepare an electrolyte solution containing sulfuric acid with a concentration of 7.12mol / l. Using 300 ml of the electrolytic solution as an anolyte, and using the remaining 300 ml as a catholyte, an evaluation solution was prepared according to the preparation method of an evaluation solution (electrolytic sulfuric acid solution).

[0149] When evaluating the prepared evaluation liquid according to the concentration determination method of peroxodisulfate ion, peroxymonosulfate ion and hydrogen peroxide in the evaluation liquid based on Raman spectroscopy, the concentration of peroxodisulfuric acid is 0.23mol / l, The sulfuric acid concentration was 0.67 mol / l, the hydrogen peroxide concentration was 0.10 mol / l, and the acid concentration was 14.24 mol / l when measured according to the acid...

Embodiment 2、3

[0153] As Examples 2 and 3, the total concentration of oxidizing substances in the evaluation solution and the ratio of the oxidizing substance components were used by changing the total concentration of oxidizing substances in the electrolytic sulfuric acid solution and the time from the preparation of the evaluation solution to the start of measurement. Except that the changed liquid was used as the evaluation liquid, it carried out similarly to Example 1, and measured the total concentration of the oxidizing substance in the evaluation liquid. The results are shown in Table 2 below.

Embodiment 4

[0155] As the evaluation solution, 712 g of 98% sulfuric acid (manufactured by Kanto Chemical Co., Ltd.) was extracted according to the above formula (4) in a 1 liter volumetric flask, and ammonium peroxodisulfate ((NH4) was used according to the above formula (5). 2 S 2 o 4 : manufactured by Wako Pure Chemical Industries, Ltd.), a liquid containing sulfuric acid at a concentration of 7.12 mol / l and peroxodisulfuric acid at a concentration of 0.3 mol / l and diluted to a total of 1 liter by adding ultrapure water, and In the same manner as in Example 1, the total concentration of oxidizing substances in the evaluation liquid was measured. The results are shown in Table 2 below.

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Abstract

Provided are: a method of measuring the total concentration of oxidizing agents, by which the total concentration can be determined in a single measurement with simple operations even in an evaluation solution containing multiple components such as persulfuric acid, perosulfate and hydrogen peroxide; a simple and inexpensive concentration meter for measuring the total concentration of oxidizing agents; and a sulfuric acid electrolysis device comprising the concentration meter. The method according to the present invention is a method of measuring the total concentration of oxidizing agent(s) in an evaluation solution containing at least one oxidizing agent. The method comprises at least the steps of: heat-treating the evaluation solution at 50 to 135° C.; and detecting hydrogen peroxide in the thus heat-treated evaluation solution.

Description

technical field [0001] The present invention relates to a method for measuring the total concentration of oxidizing substances, a densitometer for measuring the total concentration of oxidizing substances (hereinafter also simply referred to as "measurement method" and "densitometer"), and a sulfuric acid electrolysis device using the same. Background technique [0002] Persulfuric acid and hydrogen peroxide, which collectively refer to peroxodisulfuric acid and peroxymonosulfuric acid, have excellent oxidizing power. Therefore, a mixed solution of sulfuric acid and aqueous hydrogen peroxide solution, a solution obtained by directly electrolyzing sulfuric acid to oxidize it, and adding persulfuric acid or hydrogen peroxide to the solution are used as pretreatment agents for metal plating, etchant, semiconductor Chemical preparations used in various manufacturing processes or inspection processes, such as oxidizing agents in chemical mechanical polishing in equipment manufact...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/33G01N27/06G01N29/02
CPCG01N21/17G01N27/26G01N29/02G01N21/65G01N31/228G01N21/33G01N9/36G01N27/3277G01N27/416
Inventor 小坂纯子加藤昌明土门宏纪
Owner DE NORA PERMELEC LTD
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