Hemispherical resonance micro mechanical gyroscope and processing technology thereof

Abstract

The invention relates to a hemispherical resonance micro mechanical gyroscope. The hemispherical resonance micro mechanical gyroscope comprises a resonance layer, wherein the resonance layer comprises a hemispherical shell which has a concave inner surface and an outer surface opposite to the inner surface, the peak of the hemispherical shell is an anchor point, a plurality of silicon spherical surface electrodes are arranged around the hemispherical shell, the silicon spherical surface electrodes comprise drive electrodes, force balance electrodes, signal detection electrodes and shield electrodes, the drive electrodes, the force balance electrodes and the signal detection electrodes are separated by the shield electrodes, the hemispherical shell and the plurality of silicon spherical surface electrodes surrounding the hemispherical shell form a plurality of capacitors, and the resonance layer is made of polycrystalline silicon or silicon dioxide or silicon nitride or diamond. The hemispherical resonance micro mechanical gyroscope adopts the technology based on silicon micro machining, has small size and low production cost, has batch production capacity and has the sensitivity not depending on the amplitude, has low drive voltage, can greatly lower the output noise, and has higher accuracy compared with the existing gyroscope.

Description

technical field [0001] The invention relates to a hemispherical resonant micromechanical gyroscope and a processing technology based on silicon microfabrication. Background technique [0002] Silicon micromachined gyroscopes have broad application prospects in the field of inertial measurement due to their small size, low cost, low power consumption, shock resistance, and high reliability. However, the accuracy of current MEMS gyroscope products is much lower than that of fiber optic gyroscopes and laser gyroscopes, mainly because the sensitivity of most MEMS resonant gyroscopes depends on the size of their amplitude, and the noise signal becomes larger as the amplitude increases, which limits the signal-to-noise than the improvement. Due to the low sensitivity, its application field is greatly limited. [0003] The traditional hemispherical resonant gyroscope is made of quartz, and its working principle is successfully developed according to the cup vibration theory of Pr...

AI Technical Summary

Problems solved by technology

[0004] However, the traditional hemispherical resonant gyroscope is made of fused silica, which is difficult to process and high in cost. The price is as high as hundreds of thousands to one million dollars, so it cannot be widely used.

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