A kind of LED epitaxial structure and preparation method thereof
An epitaxial structure, N-type technology, used in electrical components, circuits, semiconductor devices, etc., can solve the problems of complex GaN-based epitaxial structure process and high production cost, increase carrier concentration and mobility, and reduce interface free energy. , the effect of reducing the driving voltage
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[0046] This invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of the invention to those skilled in the art, and the present invention will only be defined by the appended claims. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. It will be understood that when an element such as a layer is referred to as being "formed on" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly formed on" or "directly disposed on" another element, there are no intervening elements present.
[0047] The equipment used in the metal-organic chemical vapor deposition process described in the following examples and comparative ...
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