Multi-direction vibration threshold value sensor for achieving contact time delay through nano-micro flexible arrays

Abstract

The invention provides a multi-direction vibration threshold value sensor for achieving contact time delay through nano-micro flexible arrays. A mass block electrode is respectively connected with one end of each of eight sets of serpentine springs, and the other ends of the springs are connected with spring supporting bases and enable the mass block to be suspended between a perpendicular lower fixed electrode and a cantilever beam upper fixed electrode. The carbon nanofiber cluster array structures are distributed on the upper surface of a mass block and the lower surface of the cantilever upper fixed electrode respectively, the spring supporting bases are arranged on an insulating substrate and evenly distributed around the mass block, and one end of a radial radial-direction elastic horizontal fixed electrode is connected to a supporting column. The supporting column is arranged in the center of the mass block and suspends the radial radial-direction elastic horizontal fixed electrode between the upper surface and the lower surface of the mass block. The lower fixed electrode is fixed to the insulating substrate. Flexible contact between a movable electrode and the fixed electrode of the multi-direction vibration threshold value sensor is achieved, and the multi-direction vibration threshold value sensor sensitively responds accelerated speed impact in the + / -Z directions and the horizontal 360-degree direction.

Description

technical field [0001] The invention relates to a vibration threshold sensor device in the technical field of micro-electromechanical systems (MEMS), in particular to a multi-directional vibration threshold sensor that uses a nano-micro flexible array layer to prolong contact time. Background technique [0002] As a new type of passive device, the miniature vibration threshold sensor is widely used in various microelectronic systems because of its small size and light weight. Especially with the development of the Internet of Things system, various sensor devices are combined with the Internet Form a wireless sensor network system, and these sensors are often placed in remote environments or implanted inside objects due to certain special needs, resulting in difficulties in power supply. Compared with accelerometers and gyroscopes, vibration threshold sensors do not need to maintain a stable current under normal conditions, and their parasitic power consumption is zero, so t...

AI Technical Summary

Problems solved by technology

In the actual environment, it is difficult to ensure that the shock comes from the specified direction, so it is required to have a multi-directional sensitive MEMS vibration threshold sensor

In order to meet the demand for multi-directional sensitivity, in the existing solutions, it is often necessary to combine multiple unidirectional sensitive vibration threshold sensors, which not only increases the overall size of the system, makes it difficult to coincide with the center of mass, but also has low measurement accuracy , poor reliability, therefore, the industry has an urgent demand for multi-directional vibration threshold sensors

[0004] Silicon-based etching or electroplating based on micromachining technology, the prepared vibration threshold sensor is a rigid collision between two electrodes, which is easy to cause damage to the device, and more importantly, the rigid collision between electrodes The contact time is shortened, and the collision is easy to rebound, which brings difficulties to the later signal processing while reducing the stability of the device

After searching the existing technical literature, it was found that Luke J.Currano et al published a paper titled "Latching in a MEMS shock sensor :Modeling and experiments" ("Locked Micromechanical Vibration Sensor: Modeling and Experiments") proposed a locked sensor that can be sensitive to two directions on the horizontal plane, so that the research on the vibration threshold sensor no longer only focuses on one direction Sensitive, although this kind of locking sensor avoids the problem of short contact time caused by rigid collision between electrodes, and can realize continuous output of signals under the action of sufficient acceleration, but due to the formation of a locking structure between electrodes after collision contact , the researchers had to design an unlocking device in the device, which made the device so complex that it was easily damaged during work, and such a design undoubtedly greatly reduced the repeatability of the device

More importantly, such a device cannot be used independently to detect acceleration in three dimensions.

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