Contact type four-electrode salinity sensor based on MEMS (micro electro mechanical systems) technology and detection method of salinity sensor

Abstract

The invention discloses a contact type four-electrode salinity sensor based on an MEMS (micro electro mechanical systems) technology. The salinity sensor comprises a quartz substrate, a Si3N4 adhesion layer and platinum metal electrodes, wherein the Si3N4 adhesion layer is located on the upper surface of the quartz substrate, and the platinum metal electrodes are located on the Si3N4 adhesion layer; the platinum metal electrodes comprise contact zones, conductivity sensing electrodes and temperature sensing electrodes; Si3N4 protection layers are arranged on the front surface and the back surface of the contact type four-electrode salinity sensor based on the MEMS technology respectively; and a window is etched in the front surface of the Si3N4 protection layer, and the conductivity sensing electrodes and the temperature sensing electrodes are exposed. The invention further discloses a measurement method of the contact type four-electrode salinity sensor based on the MEMS technology, the conductivity is calculated according to the alternating current, the voltage difference and the like, and the salinity is calculated further. The contact type four-electrode salinity sensor based on the MEMS technology is small in size, has a larger measurement range and higher stability, can be contacted with seawater directly for a long time, and doesn't drift.

Description

technical field [0001] The invention relates to the field of salinity sensors, in particular to a contact-type four-electrode salinity sensor based on MEMS (Micro Electro Mechanical Systems, microelectromechanical systems) technology and a detection method thereof. Background technique [0002] Seawater salinity is a basic parameter of the natural marine ecosystem, which affects the species, structure and function of organisms. It is one of the most important observation items in marine surveys, marine fishery research and marine environmental pollution detection. Although the salinity of seawater varies from place to place, the ratio of its main components is basically constant, so the salinity can be calculated by using the conductivity. The electrode type conductivity salinity sensor has the characteristics of strong signal, high sensitivity, high anti-interference ability and simple measurement circuit. The electrode type conductivity salinity sensor currently has two e...

AI Technical Summary

Problems solved by technology

Due to the electrode polarization of the two-electrode conductivity salinity sensor, its measurement range and measurement accuracy are greatly limited, and it is also easily disturbed by the outside world.

[0004] In general, the current MEMS CTD uses silicon wafers as the base material. During the preparation and packaging process, multiple coating, photolithography, and etching steps are required. The process is relatively complicated, and the performance needs to be improved. It is necessary to optimize the device through structural design.

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