High-temperature antioxidant niobium alloy composite coating and preparation method thereof
A high-temperature anti-oxidation and composite coating technology, which is applied in chemical instruments and methods, metal material coating processes, coatings, etc., can solve problems such as poor high-temperature oxidation resistance, and achieve extended service life, good high-temperature oxidation resistance, The effect of uniform and dense coating
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Embodiment 1
[0029] A method for preparing a high-temperature oxidation-resistant niobium alloy composite coating, comprising the following steps:
[0030] 1. Pretreatment: The base material is FeCrAl alloy, and the target material is metal Nb, Cr and Al targets with a purity of 99.2%. The base material and the target material are ultrasonically cleaned in acetone and absolute ethanol for 15 minutes respectively, and dried;
[0031] 2. Preparation of coating: vacuumize the sample chamber to 2×10 -4 Pa, the volume is 50% argon gas; the surface of the substrate is cleaned by high-pressure bombardment of -400V, and the bombardment time is 20min; Cr is pre-deposited on the substrate with a thickness of 0.1 μm as a transition layer; DC reactive magnetron sputtering Nb and Cr, Nb and Cr element content: Nb40at%, Cr60at%, deposit Nb-Cr coating on the transition layer, Nb and Cr target power is fixed at 2000W, deposition time is 2h, coating The thickness is 4 μm; DC reactive magnetron sputtering ...
Embodiment 2
[0034] A method for preparing a high-temperature oxidation-resistant niobium alloy composite coating, comprising the following steps:
[0035] 1. Pretreatment: the base material is Al 2 o 3 Alloy, the target material is metal Nb, Cr and Al targets with a purity of 99.4%; the base material and the target material were ultrasonically cleaned in acetone and absolute ethanol for 15 minutes respectively, and dried;
[0036] 2. Preparation of coating: vacuumize the sample chamber to 1×10 -4 Pa, the volume is 40% argon gas; the surface of the substrate is cleaned by high-pressure bombardment of -300V, and the bombardment time is 10 minutes; Cr is pre-deposited on the substrate with a thickness of 0.05 μm as a transition layer; DC reactive magnetron sputtering Nb and Cr, Nb and Cr element content: Nb35at%, Cr65at%, deposit Nb-Cr coating on the transition layer, Nb and Cr target power is fixed at 3000W, deposition time is 1h, coating The thickness is 3 μm; DC reactive magnetron sput...
Embodiment 3
[0039] A method for preparing a high-temperature oxidation-resistant niobium alloy composite coating, comprising the following steps:
[0040] 1. Pretreatment: The base material is Ni-based superalloy DSM11, and the target material is metal Nb, Cr and Al targets with a purity of 95.0%. The base material and the target material are ultrasonically cleaned in acetone and absolute ethanol for 15 minutes respectively, blown Dry;
[0041] 2. Preparation of coating: vacuumize the sample chamber to 3×10 -4Pa, the volume is 60% argon gas; the surface of the substrate is cleaned by high-pressure bombardment of -500V, and the bombardment time is 30min; Cr is pre-deposited on the substrate with a thickness of 0.15μm as a transition layer by DC reactive magnetron sputtering; DC reactive magnetron sputtering Nb and Cr, Nb and Cr element content: Nb45at%, Cr55at%, deposit Nb-Cr coating on the transition layer, Nb and Cr target power is fixed at 3000W, deposition time is 1h, coating The thi...
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