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Method for regenerating dry harmful mediator

A medium and dry technology, applied in the direction of separation methods, filter regeneration, chemical instruments and methods, etc., can solve the problems of difficult disposal of hazardous waste, and achieve the effects of easy operation, reduced discharge, and low cost

Inactive Publication Date: 2014-03-19
QUANJIAO NANDA PHOTOELECTRIC MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The large amount of hazardous waste generated is also a difficult matter to deal with

Method used

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  • Method for regenerating dry harmful mediator
  • Method for regenerating dry harmful mediator
  • Method for regenerating dry harmful mediator

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Fill a 3 liter metal container with 2.5 liters of CuO / Ag cylinders with a diameter of 1.6mm 2 The medium of O. Introduce arsine gas with a concentration of 10,000ppmv into the container from bottom to top at a speed of 0.013m / s. When the arsine gas concentration at the outlet above the container reaches 50ppmv, stop the gas supply. Calculate the arsine removal capacity of the medium in the container according to the reaction time and arsine concentration. Then air is injected into the container from top to bottom with a compressor pump at a flow rate of 1 liter per minute. The temperature of the outer wall and the center of the container will gradually rise due to the exothermic reaction. Therefore, the air flow is constantly adjusted to maintain the temperature in the center of the vessel below 300°C. Air injection was continued until the reaction was complete and the temperature of the vessel dropped to 30°C. Close the activation gas line. Use the above conditio...

Embodiment 2

[0027] Fill a 200mL metal container with 100mL CuO / Ag containing 1~1.5mm blocks 2 Mediator of O / activated carbon. Introduce arsine gas diluted with nitrogen with a concentration of 9000ppmv into the container from bottom to top at a speed of 0.28m / s. When the concentration of arsine gas at the outlet above the container reaches 3ppmv, stop the gas supply. Calculate the reaction capacity of the medium in the container based on the reaction time and the concentration of arsine. Repeat the above experiment. This time the arsine was diluted with air instead of nitrogen to determine how well the vehicle was activated with air while removing arsenic. Table 2 records the arsine removal capacity of the media in the two experiments. Without replacing any media and equipment, the simultaneous air regeneration method increased the arsine removal capacity of the same volume of media by 2.7 times.

[0028] Table 2

[0029]

[0030]

[0031] The harmful gas is adsorbed and conve...

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Abstract

The invention relates to a method for regenerating a dry harmful mediator. A metal oxide mediator reacts with harmful gases comprising arsines and phosphoranes, and air or an oxygen-containing mixed gas is used to oxidize deactivated intermediates into metal oxides after the reaction in order to recover partial activities and realize the continuous use in the removal of the arsines and phosphoranes. Air is adopted to oxidize the mediator after the adsorption reaction in order to recover the reaction activities of arsine and phosphorane gases, so the use efficiency of the mediator is improved. The method has the advantages of reduction of the quantity of harmful wastes, simple technology, easy operation and low cost.

Description

technical field [0001] The invention relates to a method for regenerating a dry-type harmful medium, which is used for treating arsine, phosphine and other toxic gases used in the production of semiconductors and other electronic components, and belongs to the technical field of tail gas treatment. Background technique [0002] In the manufacturing process of the electronics industry such as large-scale integrated circuits and light-emitting diodes, like ion implantation and chemical deposition, it is necessary to use a large amount of arsine (AsH 3 ), phosphine (PH 3 ) and other hydride gases. Due to its toxicity and harm to the environment, the tail gas of these processes must be treated with tail gas detoxification before being discharged into the atmosphere to ensure that the released tail gas meets national and local emission standards. At present, there are many tail gas detoxification technologies, such as wet spraying, combustion method, dry reaction adsorption and...

Claims

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Application Information

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IPC IPC(8): B01J20/34B01D53/81B01D53/46
Inventor 王陆平许从应李英辉马潇朱颜王仕华王智
Owner QUANJIAO NANDA PHOTOELECTRIC MATERIAL
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