The invention discloses a method for deeply removing readily oxidizable substances in high-purity electronic-grade
phosphoric acid, which deeply removes the readily oxidizable substances in the high-purity electronic-grade
phosphoric acid in a mode of combining
ozone oxidation and resin adsorption to obtain a high-purity electronic-grade
phosphoric acid finished product with extremely low readily oxidizable substance concentration. The specific process mainly comprises the following three steps: S1, introducing
ozone gas at a certain temperature to oxidize readily oxidizable substances such as
phosphorous acid and
hypophosphorous acid in phosphoric acid into phosphoric acid so as to reduce the concentration of the readily oxidizable substances; s2, feeding the phosphoric acid subjected to
ozone oxidation into an adsorption reactor to be in contact with an adsorbent, and further removing residual readily oxidizable substances in the phosphoric acid; and S3, filtering the phosphoric acid subjected to adsorption treatment through a
filter element for separation, and removing residual
small particles and impurities to obtain the electronic-grade phosphoric acid with readily oxidizable substances removed. The method is simple in process, controllable in condition, convenient to operate, safe and environment-friendly, does not need to add an additional
solvent, avoids introduction of new impurities, reduces secondary
pollution, and is suitable for preparing high-purity electronic-grade phosphoric acid.