Nano-particle reinforced copper-based composite material and preparation method thereof

A technology of copper-based composite materials and nanoparticles, applied in the direction of nanotechnology, nanotechnology, nanotechnology for materials and surface science, etc., can solve the problems of poor mechanical properties, high cost, and many processes, and achieve low cost, The effect of long time and many processes

Active Publication Date: 2014-03-19
嘉兴市燕知网络科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Similarly, this process also has the disadvantages of poor mechanical properties, many processes, and high cost.
In short, there

Method used

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  • Nano-particle reinforced copper-based composite material and preparation method thereof
  • Nano-particle reinforced copper-based composite material and preparation method thereof

Examples

Experimental program
Comparison scheme
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Example Embodiment

[0024] Example 1:

[0025] Put the copper ingot and graphite ingot into the crucible, and put 200g molybdenum on the graphite ingot, and 5g CaF on the copper ingot 2 ; Close the vacuum chamber and start vacuuming; start the rotating device to rotate the substrate at a speed of 6rpm, and turn on the substrate heating device to heat the substrate temperature to stabilize at 650℃; when the vacuum degree reaches 3×10 -2 When Pa, open the baffle, electron gun, and deposit the isolation layer CaF 2 ; Heat the copper ingot with the beam size of 1.5A, heat the graphite ingot with the beam size of 1.5A, and start to deposit the material. After 50 minutes of deposition, turn off the electron gun, pull up the baffle, turn off the heating device, and turn off the substrate rotating device; When the temperature drops below 200°C, close the vacuum system, remove the substrate, and separate to obtain a plate with a thickness of 0.26 mm and a diameter of 520 mm. The composition of the prepared pl...

Example Embodiment

[0026] Example 2:

[0027] Put the copper ingot, molybdenum ingot and anthracene powder into the crucible separately, and put 5g CaF on the copper ingot 2 ; Close the vacuum chamber and start vacuuming; start the rotating device to rotate the substrate at a speed of 15rpm, and turn on the substrate heating device to heat the substrate temperature to stabilize at 750℃; when the vacuum degree reaches 3×10 -2 When Pa, open the baffle, electron gun, and deposit the isolation layer CaF 2 ; Heat the copper ingot with the beam size of 2.2A, heat the molybdenum ingot with the beam size of 2.6A, and heat the anthracene powder with the beam size of 0.6A to start depositing materials. After 30 minutes of deposition, turn off the electron gun and pull up the baffle. Turn off the heating device and turn off the substrate rotating device; when the substrate temperature drops below 200°C, turn off the vacuum system, remove the substrate, and separate to obtain a plate with a thickness of 0.3mm an...

Example Embodiment

[0028] Example 3:

[0029] Put the copper ingot, molybdenum ingot and anthracene powder into the crucible separately, and put 5g ZrO on the copper ingot 2 ; Close the vacuum chamber and start vacuuming; start the rotating device to rotate the substrate at a speed of 8 rpm, and turn on the substrate heating device to heat the substrate temperature to stabilize at 650 ℃; when the vacuum degree reaches 3×10 -2 When Pa, open the baffle and electron gun, deposit the isolation layer ZrO 2 ; Heat the copper ingot with a beam size of 2.2A, heat the molybdenum ingot with a beam size of 2.0A, and heat the anthracene powder with a beam size of 1A to start depositing materials. After 40 minutes of deposition, turn off the electron gun, pull up the baffle, and close The heating device turns off the substrate rotating device; when the substrate temperature drops below 200°C, the vacuum system is turned off, the substrate is removed, and a plate with a thickness of 0.38 mm and a diameter of 520 m...

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Abstract

The invention discloses a nano-particle reinforced copper-based composite material and a preparation method thereof. The size of a copper matrix grain is smaller than 20 microns in the copper-based composite material; the nano-particle reinforced phase is molybdenum carbide, or molybdenum carbide and molybdenum, or molybdenum carbide and carbon; the particle size of the nano-particle reinforced phase is smaller than 200nm; the mass percent of Mo in the copper-based composite material is 0.1-15%; the mass percent of C is smaller than 1%. The nano-particle reinforced copper-based composite material disclosed by the invention is prepared by adopting an electronic beam physical vapor deposition process. The nano-particle reinforced copper-molybdenum-carbon composite material prepared by the method has excellent mechanical property and electrical property, and adopted electronic beam physical vapor deposition process is simple, low in cost and easy to control.

Description

technical field [0001] The invention relates to a copper-based composite material reinforced by nanoparticles and a preparation method thereof, in particular to a copper-molybdenum-carbon composite material reinforced by nanoparticles and a preparation method thereof. Background technique [0002] Copper and copper alloy materials are important non-ferrous metal materials, which have been widely used in the electronics industry and other fields due to their excellent physical and mechanical properties. However, with the rapid development of science and technology (especially the rapid development of the microelectronics industry), traditional copper and its alloys cannot meet the requirements due to the inability to balance electrical properties and strength. Nano-dispersion-strengthened copper alloy is a new type of composite material with nanoparticles as the second phase. Because nanoparticles can effectively hinder dislocation movement and grain boundary slip, the mechan...

Claims

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Application Information

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IPC IPC(8): C22C9/00C22C1/02B82Y40/00B82Y30/00
Inventor 李晓宋广平卜凡雨徐斌楼白杨
Owner 嘉兴市燕知网络科技有限公司
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