Patterned electrode preparation method

Abstract

The invention belongs to the field of organic electronic devices and particularly relates to a patterned electrode preparation method. The invention adopts the technical scheme as follows: an electrode pattern protection film with oil ink is printed on the substrate of an electrode by a UV flat inkjet printer, the substrate is put into a corrosive liquid to corrode the electrode not protected by the oil ink on the substrate so as to form the patterned electrode on the substrate, the oil ink is removed through ultrasonic washing with the help of deionized water and an alkaline solution, then the patterned electrode is prepared, and the organic electronic device is further prepared on the patterned electrode. The patterned electrode prepared through the method provided by the invention has tidy edges, is not zigzag and simple in operation and does not need special process or equipment, and the patterned electrode preparation method is suitable for manufacturing a metal oxide electrode commonly used for a semiconductor device, and popularization and application are facilitated.

Description

technical field [0001] The invention belongs to the field of organic electronic devices, and in particular relates to a method for preparing a patterned electrode. Background technique [0002] The patterning of transparent electrodes of organic electronic devices is usually prepared by the traditional wet etching method. The traditional electrode patterning method is to spin-coat (print) photoresist on the conductive film, and then pre-baking, exposing, developing, and hardening the film. After the photolithography process, the patterning of the protective layer is formed, and then the semiconductor substrate to be etched with the pattern of the protective layer is immersed in an etching solution controlled within a certain temperature range for etching. Finally, rinse the taken out semiconductor substrate with deionized water, put it into a stripping solution to remove the glue, and then process it again to obtain a patterned electrode. [0003] This traditional method is...

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Problems solved by technology

[0003] This traditional method is usually done in a yellow light clean room. The thickness of the glue film is controlled by the speed and time of the glue application. The glue must be uniform to ensure the integrity of the prepared electrode pattern. During the glue application process, there must be no dirty spots. Bubbles, otherwise the pattern will be missing; exposure needs to transfer the mask pattern to the substrate, different electrode patterns need different masks, the exposure process needs to control the exposure amount and time to adjust the photoresist degree of sensitivity If there is too much, the graphics will be washed away after development, and if the photosensitive is too little, the graphics will not be separated; the developer needs to be used in conjunction with the photoresist, and the development time should be well controlled, otherwise there will be less and over-display phenomena; therefore, the existing preparation The method of patterning electrodes not only requires more expensive gluing, exposure, and development equipment, but also requires corresponding process control, that is, this preparation method has low efficiency, high cost, and poor operability.

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