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Preparation method of three-dimensional crystal optical whispering gallery microcavity

A technology of crystal optics and whispering gallery, applied in laser welding equipment, manufacturing tools, welding equipment, etc., can solve the problems of affecting the Q value of crystal microcavity, unsuitable crystal, etc., achieve high quality factor, improve roughness, and broaden the variety Effect

Active Publication Date: 2015-10-28
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

However, the reflow technology is not suitable for crystals. For example, some crystals do not absorb carbon dioxide beams; and the crystals that absorb it will generate amorphous crystallites inside due to rapid heating and cooling, resulting in scattering centers, which will greatly affect the crystallization. Cavity Q

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  • Preparation method of three-dimensional crystal optical whispering gallery microcavity
  • Preparation method of three-dimensional crystal optical whispering gallery microcavity

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Embodiment Construction

[0024] The present invention will be further described below by examples and accompanying drawings, but the protection scope of the present invention should not be limited by this.

[0025] see first figure 1 , figure 1 It is a schematic flow chart of the method for preparing a three-dimensional crystal microcavity with a high quality factor by using a femtosecond laser in the present invention. Now, calcium fluoride crystal is used as an example to illustrate the method of the present invention. It can be seen from the figure that the present invention uses a femtosecond laser to prepare a crystal microcavity. method, including the following two steps:

[0026] 1) Femtosecond laser ablation:

[0027] The diameter of the small pillar is designed to be 40 μm, the diameter of the microdisk is 100 μm; the height of the small pillar is 20 μm, the thickness of the microdisk is 10 μm, and the maximum diameter of the laser ablation area is 180 μm;

[0028] Clean the upper and lowe...

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Abstract

The invention provides a preparation method for a three-dimensional crystal optics echo wall micro-cavity. The preparation method comprises the steps: carrying out femtosecond laser selective ablation on crystals soaked in liquid and grinding the lateral wall of the micro-cavity by using a focused ion beam. The three-dimensional crystal optics echo wall micro-cavity prepared by adopting the method provided by the invention can be used for limiting light through continuous total internal reflection of the cavity and an outside face, and has the advantages of extremely high surface smoothness, small mode volume and high quality factor. The preparation method is applicable to various crystal materials, glass and the like.

Description

technical field [0001] The invention relates to femtosecond laser processing, in particular to a preparation method of a three-dimensional crystal optical whispering gallery microcavity. Background technique [0002] The optical whispering gallery microcavity uses the continuous total internal reflection between the medium cavity and the surrounding environment at the boundary of the cavity to confine the light in the medium for a long time, with a very high quality factor, in nonlinear optics, quantum physics and biotransmission sense has important applications. The optical whispering gallery microcavity is made of crystal material, which is called a crystal microcavity. Due to the high purity, high refractive index, high stability and high linear and nonlinear coefficients of the crystal itself, the crystal microcavity has attracted much attention. Although Q values ​​as high as 10 can be obtained in amorphous glasses 9 Because crystal materials can provide good optical ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C99/00B23K26/362B23K26/00
Inventor 唐家雷林锦添程亚何飞乔玲玲
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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