Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

A high-silicon PVD hard coating process

A hard coating and process technology, which is applied in the field of high-silicon PVD hard coating technology, can solve the problems of restricting the application of high temperature and anti-wear fields, high temperature friction coefficient, etc., and achieve the goal of improving competitiveness, strong performance and high efficiency Effect

Active Publication Date: 2016-01-13
PVT COATING CHANGZHOU
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The existing TiAlSiN silicon coating has high hardness and strength, and has broad application prospects in the field of tool coating preparation, but its high temperature friction coefficient limits its application in the field of high temperature wear resistance

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0032] A kind of high silicon PVD hard coating process is characterized in that: comprises the following steps:

[0033] (1) Load the workpiece: load the cleaned workpiece into the vacuum furnace;

[0034] (2) Vacuuming: Vacuum is formed in the vacuum furnace, and the pressure is reduced to p<0.0001mbar;

[0035] (3) Workpiece heating: Heating the workpiece through the heating tube in the furnace to 400-500°C for 1-2 hours;

[0036] (4) Cleaning of the target itself: argon gas is introduced into the vacuum furnace, the bias voltage is 300v, the argon gas fills the furnace cavity, the target material generates plasma, and the target material is cleaned through the ion etching process, and the cleaning time is 360s;

[0037] (5) Workpiece cleaning: Argon gas is introduced into the vacuum furnace, the bias voltage is 500v-600v, the cleaning time is 720s-1020s, and the flow rate of argon gas is 50-100 sccm. When the target is powered on, and the coating in the target The layer m...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a high-silicon-containing PVD (Physical Vapor Deposition) hard coating process. The high-silicon-containing PVD hard coating process comprises the following steps: (1) loading a workpiece; (2) vacuumizing; (3) heating the workpiece; (4) washing a target body; (5) washing the workpiece; (6) coating; and (7) cooling. According to the high-silicon-containing PVD hard coating process, the vacuum degree is changed and the flows of reaction gas including nitrogen and acetylene are changed; the flow range of the reaction gas nitrogen is 200-400sccm; the flow of the reaction gas acetylene is 20sccm; the acetylene is used for changing the color of the coating and also has the lubrication effect and the effect of reducing the friction. According to the high-silicon-containing PVD hard coating process, the flows of the reaction gas including nitrogen and acetylene are changed on the basis of a previous silicon coating and the vacuum degree is changed to achieve the unexpected effect, so that the coating efficiency is high and the performance is strong.

Description

technical field [0001] The invention relates to the technical field of metal processing, in particular to a high-silicon-containing PVD hard coating process. Background technique [0002] PVD technology is a new technology integrating machinery, materials, electronic physics, vacuum control and other technologies. It can be widely used in the preparation of various coatings, effectively improving the surface hardness, toughness, wear resistance, high temperature stability and service life of materials. It has broad application prospects in modern industry. With the development of modern metal cutting processing, more stringent requirements are put forward for the performance of cutting tools. In order to meet this demand, people pay more and more attention to the application and development of cutting tool coating technology. [0003] In recent years, coating technology has developed rapidly. In terms of coating materials, from the earliest TiN coating, TiCN, (Ti, Al) N, Al...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/32C23C14/06
Inventor 王信德
Owner PVT COATING CHANGZHOU
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com