Unlock instant, AI-driven research and patent intelligence for your innovation.

Micro-mechanical clamped beam type sixteen-state reconfigurable microwave band-pass filter

A technology of fixed-support beams and microwave bands, which is applied in semiconductor/solid-state device components, waveguide devices, image communications, etc., can solve the problems of high integration, limited passive filters, etc., and achieve the effect of small chip area

Active Publication Date: 2014-05-21
SOUTHEAST UNIV
View PDF4 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method limits the performance of the passive filter due to the low quality factor of the on-chip inductor, but its integration level is high

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Micro-mechanical clamped beam type sixteen-state reconfigurable microwave band-pass filter
  • Micro-mechanical clamped beam type sixteen-state reconfigurable microwave band-pass filter
  • Micro-mechanical clamped beam type sixteen-state reconfigurable microwave band-pass filter

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0016] specific implementation plan

[0017] The specific implementation scheme of the sixteen-state reconfigurable microwave bandpass filter of the micromechanical fixed beam type of the present invention is as follows:

[0018] A CPW1 with a port characteristic impedance of 50Ω, a planar spiral inductor 2, two first MIM capacitors 3 and a second MIM capacitor 4 connected in parallel between the CPW signal line and the ground line are provided on the gallium arsenide substrate 19, Two third MIM capacitors 5 and fourth MIM capacitors 6 connected in series to the CPW signal line, four fifth MIM capacitors 7 , sixth MIM capacitors 8 , seventh MIM capacitors 9 and eighth MIM capacitors 10 connected by wires , leads 12, bumps 13, MEMS fixed support beams 14, driving electrodes 15, connecting wires 16, pressure soldering blocks 17 and air bridges 18:

[0019] CPW1 is composed of three lines on the same plane, wherein one line in the middle is the signal line of CPW and the two lin...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a micro-mechanical clamped beam type sixteen-state reconfigurable microwave band-pass filter. Two MIM capacitors which are connected between a CPW signal wire and a ground wire in parallel and two MIM capacitors which are connected to the CPW signal wire in series are symmetrically arranged at the left and right sides of a planar spiral inductor in sequence so as to form band-pass characteristics of the filter; four MIM capacitors which are connected through leads are symmetrically arranged at the left and right sides of the planar spiral inductor and are located between two MIM capacitors which are connected between the CPW signal wire and the ground wire in parallel; each MIM capacitor connected through leads has different capacitance value; the connections between the four MIM capacitors connected through leads and the CPW ground wire are controlled through four MEMS clamped beams, so that the reconfigurable microwave band-pass filter has sixteen-state center frequency and band width by the aid of the planar spiral inductor with smaller inductance and the MIM capacitors with smaller capacitance values, and the micro-mechanical clamped beam type sixteen-state reconfigurable microwave band-pass filter breaks through the disadvantage that the traditional reconfigurable microwave band-pass filter has too many inductors and capacitors with big values.

Description

technical field [0001] The invention proposes a micro-mechanical fixed-beam type sixteen-state reconfigurable microwave band-pass filter, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] Filters are one of the most important devices in microwave engineering. An ideal filter is a two-port network: it completely transmits microwave signals in the passband range, and completely disables microwave signal transmission in the stopband range. Today, since multi-frequency operation is becoming more common in areas such as radar and communications, and the requirements for frequency selection and rejection are correspondingly increased, a large number of high-performance filters are required. According to basic circuit theory, filters are generally divided into four categories: low-pass, high-pass, band-pass and band-stop filters. Band-pass filter is the most widely used and has important research significance. At prese...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H03H7/12H01P1/20B81B7/02
Inventor 张志强廖小平
Owner SOUTHEAST UNIV