Micro-mechanical cantilever beam type four-state reconfigurable microwave band-pass filter and preparation method

Abstract

The invention discloses a micro-mechanical cantilever beam type four-state reconfigurable microwave band-pass filter. The micro-mechanical cantilever beam type four-state reconfigurable microwave band-pass filter has the same advantages of low loss, good out-of-band rejection and so on as the traditional reconfigurable band-pass filter, and moreover, because the micro-mechanical cantilever beam type four-state reconfigurable microwave band-pass filter uses a planar spiral inductor with smaller inductance, the chip area is smaller, the frequency band tuning is wide, and the filter is compatible with a gallium arsenide monolithic microwave integrated circuit. Two MIM capacitors which are connected between a CPW signal wire and a ground wire in parallel and two MIM capacitors which are connected to the CPW signal wire in series are symmetrically arranged at the left and right sides of the planar spiral inductor in sequence so as to form a basic structure of the microwave band-pass filter; the reconfigurable structure of the filter is composed of two MEMS cantilever beams and four MIM capacitors connected by leads. The MIM capacitors connected by leads are connected between the CPW signal wire and the ground wire in parallel through controlling an MEMS cantilever beam so as to change the values of the MIM capacitors which are connected with the left and right sides of the planar spiral inductor in parallel and realize the four-state center frequency and band width.

Description

technical field [0001] The invention provides a micro-mechanical cantilever beam type four-state reconfigurable microwave band-pass filter and a preparation method thereof, belonging to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] The development of reconfigurable filters has great application value in both military and civilian microwave communication systems. It greatly reduces the system size in multi-band applications, and can dynamically select and suppress the frequency of signals according to needs. In filter design, passive inductors and capacitors are the easiest way to implement an on-chip filter. For the design of reconfigurable networks, MEMS switches and varactors are ideal choices. Moreover, MEMS technology can significantly improve the quality factor and self-resonant frequency of on-chip passive inductors. However, currently reported reconfigurable LC microwave filters can achieve multiple center frequency ch...

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Problems solved by technology

However, currently reported reconfigurable LC microwave filters can achieve multiple center frequency changes, but they generally require several inductors and the inductance of the inductor is large, which not only increases the size but also increases the parasitic loss

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