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Hard film, hard film formed body, and rolling bearing

By using a hard film composed of a first mixed layer mainly composed of chromium and tungsten carbide, a second mixed layer mainly composed of tungsten carbide and diamond-like carbon, and a surface layer mainly composed of diamond-like carbon, the DLC film is solved in the rolling bearing. The problems of poor adhesion and insufficient peeling resistance in rolling bearings are achieved by achieving wear and corrosion resistance under high contact stress and impact force, extending the service life of the bearings.

Active Publication Date: 2014-05-21
NTN CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there are disadvantages such as weak adhesion and easy peeling.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0108] [Film formation on flat plates and inner and outer rings]

[0109] The hard film of the present invention was formed on a predetermined base material, and the physical properties of the hard film were evaluated. In addition, the same hard film was actually formed on the inner ring raceway surface and the outer ring raceway surface of the rolling bearing, and the bearing was evaluated.

[0110] The base material, UBMS apparatus, and sputtering gas used for the evaluation of the hard film are as follows.

[0111] (1) Substrate material: Substrate shown in each table

[0112] (2) Substrate size, etc.: a disc with the surface roughness shown in each table (φ48mm×φ8mm×7mm, film formed on a flat surface)

[0113] (3) UBMS device: Kobe Steel; UBMS202 / AIP composite device

[0114] (4) Sputtering gas: Ar gas

[0115] Next, the formation conditions of the first mixed layer (base layer) will be described. Vacuum the chamber to 5×10 -3Around Pa, the substrate was baked with a...

Embodiment A1～A10、A12、 comparative example A1～A7

[0119] Examples A1-A10, A12, Comparative Examples A1-A7, Reference Examples A1-A9

[0120] The base materials shown in Tables 1 to 3 were ultrasonically cleaned with acetone, and then dried. After drying, the substrate was mounted on a UBMS / AIP composite device, and the first mixed layer and the second mixed layer of the materials shown in the tables were formed under the above-mentioned formation conditions. On this, a DLC film was formed as a surface layer under the film-forming conditions shown in each table, and a test piece having a hard film was obtained. In addition, the "vacuum degree" in each table|surface is the vacuum degree in the film-forming chamber in the said apparatus. The obtained test pieces were subjected to the following wear test, hardness test, film thickness test, scratch hardness test, and thrust type rolling fatigue test (except for the reference example). Record the results together in each table. In addition, 1) to 7) described below in Table 1 a...

Embodiment A11

[0122] Manufactured by Nippon Denshi Kogyo Co., Ltd.: A base material (Vickers hardness Hv1000) treated with plasma nitrogen was ultrasonically cleaned with acetone using a radical nitriding device, and then dried. After drying, the substrate was mounted on a UBMS / AIP composite device, and the first mixed layer (Cr / WC) and the second mixed layer (WC / DLC) of the materials shown in Table 1 were formed under the above-mentioned formation conditions. On this, a DLC film was formed as a surface layer under the film-forming conditions shown in Table 1 to obtain a test piece having a hard film. The same test as in Example A1 was applied to the obtained test piece, and the results are listed in Table 1 together.

[0123]

[0124] For the test piece obtained Figure 8 The friction tester shown performs the friction test. Figure 8 (a) represents the front view, Figure 8 (b) represents a side view. SUJ2 quenched steel with a surface roughness Ra of 0.01 μm or less and a Vickers h...

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PUM

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Abstract

Provided are: a hard film which has high wear resistance and excellent separation resistance and is thus capable of preventing separation for a long time; and a hard film formed body which is provided with the hard film. A hard film (8) has a structure that is configured of: a first mixture layer (8a) which is mainly composed of Cr and WC and is directly formed on an inner ring raceway surface (2a) of an inner ring (2) of a rolling bearing that serves as the base; a second mixture layer (8b) which is mainly composed of WC and DLC and is formed on the first mixture layer (8a); and a surface layer (8c) that is mainly composed of DLC and is formed on the second mixture layer (8b). The first mixture layer (8a) is a layer wherein the Cr content decreases and the WC content increases continuously or in stages from the base side toward the second mixture layer (8b) side. The second mixture layer (8b) is a layer wherein the WC content decreases and the DLC content increases continuously or in stages from the first mixture layer (8a) side toward the surface layer (8c) side, and the hydrogen content in the second mixture layer (8b) is 10-45% by atom.

Description

technical field [0001] The present invention relates to a hard film excellent in wear resistance and peeling resistance formed on members made of iron base materials and superhard materials such as sliding members, automobile parts, and forming dies, and a hard film formed with the hard film. Plasma membrane formers. In particular, it relates to a rolling bearing in which the above-mentioned hard film is formed on an inner ring raceway surface, an outer ring raceway surface, a rolling element surface, a sliding contact surface of a cage, and the like. Background technique [0002] The hard carbon film is generally a hard film called diamond-like carbon (hereinafter referred to as DLC. In addition, a film / layer mainly composed of DLC is also called a DLC film / layer.). Hard carbon also has various names such as hard amorphous carbon, amorphous carbon, hard amorphous carbon, i-carbon, and diamond-like carbon, but these terms are not clearly distinguished. [0003] The essence...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06F16C33/58
CPCF16C33/62C23C14/024C23C14/027C23C14/0605C23C14/3464C23C28/324C23C28/341C23C28/343C23C28/347C23C28/36F16C33/32F16C33/34F16C33/565F16C33/64F16C33/6603F16C2202/04F16C2204/44F16C2204/66F16C2206/04F16C2206/58F16C2206/82F16C2223/14F16C2223/30Y10T428/2495Y10T428/30
Owner NTN CORP
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