A kind of preparation method of high-efficiency infrared thermo-optic modulator

Abstract

Disclosed is a manufacturing method for a high-efficiency infrared heat light modulator. The high-efficiency infrared heat light modulator is formed by packaging an upper zinc selenide substrate, a lower zinc selenide substrate, four grapheme electrodes and tungsten doped vanadium dioxide thin film layers. The manufacturing process is characterized in that two grapheme electrodes are manufactured on each zinc selenide substrate firstly, then one tungsten doped vanadium dioxide thin film layer is manufactured on each zinc selenide substrate and the corresponding grapheme electrodes, finally the tungsten doped vanadium dioxide thin film layers on the two zinc selenide substrates are attached, and the high-efficiency infrared heat light modulator is manufactured in a packaging mode. The high-efficiency infrared heat light modulator can modulate infrared band heat light, and has the advantages of being high in heating efficiency, achieving femto-second grade in modulation speed, and being low in energy consumption, low in inserting loss, simple in manufacturing process and the like.

Description

technical field [0001] The invention relates to a preparation method of a high-efficiency infrared thermo-optic modulator, which belongs to the field of modern optical technology. Background technique [0002] As an information carrier, light waves have particularly significant advantages: first, the propagation speed of light is the fastest, which meets the requirements of the rapidly developing information age; second, the frequency of light can reach 10 14 Above Hz, the signal is allowed to have a very wide bandwidth; finally, the propagation of light is independent, and the light propagates in space without interfering with each other, making the research of optical modulators a hot topic. The patent with the publication number: CN102472900A discloses an optical modulator, an MZI type optical modulator using a phase shifter made of a material having an electro-optic effect, and has an optical modulator that can make the two arms of the optical modulator generate the same...

AI Technical Summary

Problems solved by technology

The patent with the publication number: CN102472900A discloses an optical modulator, an MZI type optical modulator using a phase shifter made of a material having an electro-optic effect, and has an optical modulator that can make the two arms of the optical modulator generate the same direction. A phase shifter with phase change, the optical modulator has a complex structure and low efficiency

The patent with the publication number: CN1319175C discloses a multi-quantum well optical modulator / detector array device based on the exciton effect. This invention has a large volume, cumbersome manufacturing process and low efficiency

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