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A craln/mos2 multilayer coating with high hardness and low friction coefficient and its preparation method

A low friction coefficient, multi-layer coating technology, used in chemical instruments and methods, coatings, metal material coating processes, etc., can solve the problem of hardness, friction and wear performance, deposition efficiency and cost, hardness and friction resistance The wear performance needs to be improved, the production efficiency and cost are high, and the production cost is low, the dislocation movement is suppressed, and the production efficiency is high.

Active Publication Date: 2016-02-10
UNIV OF SHANGHAI FOR SCI & TECH +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] However, the above-mentioned existing coatings still have the problems of hardness, friction and wear performance, deposition efficiency and cost, and have a series of shortcomings such as hardness and friction and wear resistance to be improved, high production efficiency and cost.

Method used

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  • A craln/mos2 multilayer coating with high hardness and low friction coefficient and its preparation method

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Experimental program
Comparison scheme
Effect test

preparation example Construction

[0039] Preparation, characterization and measuring instruments used in the present invention:

[0040] JGP-450 Magnetron Sputtering System, Shenyang Scientific Instrument Development Center Co., Ltd., Chinese Academy of Sciences

[0041] D / MAX2550VB / PC X-ray diffractometer, Japan Rigaku Co., Ltd.

[0042] NANOIndenterG200 nanoindenter, Agilent Technologies, USA

[0043] TecnaiG 2 Model 20 high-resolution transmission electron microscope, FEI, USA

[0044] HSR-2M coating friction and wear testing machine, Lanzhou Zhongke Kaihua Technology Development Co., Ltd.

Embodiment 1

[0046] A CrAlN / MoS with high hardness and low coefficient of friction 2 Multi-layer coating, that is, CrAlN nano-layers and MoS are formed by alternate sputtering deposition on the substrate by means of multi-target magnetron sputtering 2 Nano layer, the layer close to the substrate is CrAlN nano layer, and the top layer is MoS 2 Nano layer;

[0047] The CrAlN / MoS with high hardness and low friction coefficient 2 The total thickness of the multilayer coating is about 2.5 μm, the thickness of each CrAlN nanolayer is about 5.0 nm, and the thickness of each MoS 2 The thickness of the nanolayer is 0.2nm;

[0048] The substrate is cemented carbide.

[0049] The aforementioned CrAlN / MoS with high hardness and low coefficient of friction 2 Multi-layer coating, MoS 2 Nanolayer thickness of 0.2nm, MoS 2 The layer is crystallized by CrAlN and has a face-centered cubic structure.

[0050] The aforementioned CrAlN / MoS with high hardness and low coefficient of friction 2 The prepa...

Embodiment 2

[0066] A CrAlN / MoS with high hardness and low coefficient of friction 2 Multi-layer coating, CrAlN nano-layers and MoS are formed by alternate sputtering deposition on the substrate by means of multi-target magnetron sputtering 2 Nano layer, the layer close to the substrate is CrAlN nano layer, and the top layer is MoS 2 Nano layer;

[0067] The CrAlN / MoS with high hardness and low friction coefficient 2 The total thickness of the multilayer coating is about 2.9 μm, the thickness of each CrAlN nanolayer is about 5.0 nm, and the thickness of each MoS 2 The thickness of the nanolayer is 0.6nm;

[0068] The substrate is high speed steel.

[0069] The aforementioned CrAlN / MoS with high hardness and low coefficient of friction 2 Multi-layer coating, MoS 2 Nanolayer thickness of 0.2nm, MoS 2 The layer is crystallized by CrAlN and has a face-centered cubic structure.

[0070] The aforementioned CrAlN / MoS with high hardness and low coefficient of friction 2 The preparation me...

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Abstract

The invention discloses a CrAlN / MoS2 multilayer coating with high hardness and low friction coefficient and a preparation method thereof. The CrAlN / MoS2 multilayer coating is deposited on a substrate by alternate sputtering by multi-target magnetron sputtering A CrAlN nano-layer and a MoS2 nano-layer are formed, the CrAlN nano-layer is close to the substrate, and the uppermost layer is a MoS2 nano-layer. The total thickness of the CrAlN / MoS2 multilayer coating is 2.0-4.5 μm, the thickness of each CrAlN nano-layer is 5.0 nm, and the thickness of each MoS2 nano-layer is 0.2-1.4 nm. Its preparation method is to put the cleaned substrate into a multi-target magnetron sputtering apparatus, and alternately stay in front of the CrAl alloy target and the MoS2 target in an argon and nitrogen mixed atmosphere, and adjust the power and deposition time of the CrAl target and MoS2 target In order to control the thickness of each coating, the CrAlN / MoS2 multi-layer coating is finally obtained.

Description

technical field [0001] The present invention relates to a new type of hard protective coating, in particular to a CrAlN / MoS with high hardness and low coefficient of friction 2 The multi-layer coating and its preparation method are mainly used in service occasions requiring high hardness and high friction resistance. Background technique [0002] With the development of society and the advancement of science and technology, higher and higher requirements are put forward for the surface properties of materials. Not only are they required to have high hardness and corrosion resistance, but they are also required to have high friction and wear resistance to meet Higher and higher engineering needs. Coating a layer of protective hard coating on the surface of the material is an economical and practical way to improve the surface performance of the material. As an important branch of the mechanical functional film, the protective coating is widely used in machining tools, especi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B32B15/04B32B9/04C23C14/06C23C14/14C23C14/35
Inventor 李伟汪鸿涛李明辉
Owner UNIV OF SHANGHAI FOR SCI & TECH