Device for measuring nano-scale light field phase distribution

A nanoscale and measurement device technology, applied in the field of nano-optics and nano-photonics measurement, can solve the problems of inability to measure phase distribution and achieve the effect of synchronous scanning imaging measurement

Active Publication Date: 2014-08-27
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Most of the existing near-field optical microscopes can obtain the sample morphology and light intensity distribution, but cannot measure the phase distribution.

Method used

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  • Device for measuring nano-scale light field phase distribution
  • Device for measuring nano-scale light field phase distribution
  • Device for measuring nano-scale light field phase distribution

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0061] Example 1. Control of in-plane light field by surface plasmon devices

[0062] Surface plasmon polaritons (SPPs) are electromagnetic oscillations coupled with charge density fluctuations excited on the metal-dielectric interface. They have the characteristics of near-field enhancement, surface confinement, and short wavelength. play an important role in the research. Usually, the wavevector of SPPs and the wavevector of light do not match, so SPPs can only be excited under certain incident angles and polarization states.

[0063] This example introduces an in-plane focusing arc structure, which is designed using the principle of SPP phase interference, and can realize directional excitation and focusing of left and right circularly polarized light.

[0064] S1. Coating a layer of metal film on the glass substrate, the metal material can be gold or silver, and the thickness of the film is about 50nm, so that the evanescent field can pass through the metal film from the ...

example 2

[0068] Example 2. Research on the distribution characteristics and propagation modes of the optical field in the micro-nano optical waveguide

[0069] S1. Coating a layer of gold film on the glass substrate, the film thickness is less than 100nm to ensure light transmittance; grow 500nm photoresist on the gold film, after exposure and corrosion, cure a 3 micron wide optical waveguide on the surface;

[0070] S2. The excitation light source is a semiconductor laser with a wavelength of 532nm. After beam shaping and focusing, a spot with a diameter of about 20 microns is irradiated at the position of the waveguide on the sample plane;

[0071] S3. When the SPP excited on the surface propagates, when encountering the waveguide structure, light will be coupled into the waveguide and continue to propagate; when the incident angle is changed, different light field modes can be excited in the waveguide.

[0072] S4. Combined with the law of phase distribution and amplitude distributi...

example 3

[0074] Example 3. Research on phase modulation of light field by metal nanoantenna array

[0075] When the beam passes through the regularly arranged nano-metal array, the phase of the transmitted beam will be delayed to different degrees due to the coupling and interaction between the electric field and the free electrons in the metal. The amount of retardation depends on the size, shape and arrangement of the nanorods. After mastering this rule, the nano-antenna array can be arranged artificially to modulate the phase of the incident plane beam to produce the desired wavefront distribution.

[0076] S1, using EBL and lift-off methods to fabricate gold nanorod arrays on glass substrates;

[0077] S2. The arrangement direction of the gold nanorods in the array changes regularly according to the modulation requirement. The rods are 50nm wide, 200nm long, and 40nm high, and the distance between two adjacent rods is 400nm.

[0078] S3. The excitation light source adopts a He-N...

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Abstract

The invention discloses a device for measuring nano-scale light field phase distribution. The device comprises a scanning near field optical microscope, a heterodyne interference light path module, a microscope observation alignment module, a signal collection and synchronous demodulation module and a signal processing, storing and displaying module, wherein the scanning near field optical microscope is used for achieving scanning of nano-scale spatial resolution and signal collection, the heterodyne interference light path module is used for generating low-frequency beat signals which can be processed, possibility is provided for phase demodulation, the microscope observation alignment module is used for monitoring the probe point scanning state and assisting in achieving alignment of a probe point, a sample and illumination light, the signal collection and synchronous demodulation module can control a probe to conduct scanning at a nano-scale precision and a nano-scale step pitch, demodulate collected signals in real time and output the light field vibration amplitude and the phase information of a corresponding point, and the signal processing, storing and displaying module collects and stores measurement results and generates a synchronous spatial position topology topography and a corresponding light field vibration amplitude and a phase distribution graph on a computer. The device for measuring nano-scale light field phase distribution can achieve measurement of field distribution of a section at any height in a space and 3D field distribution.

Description

technical field [0001] The invention relates to the field of nano-optics and nano-photonics measurement, in particular to a nano-scale optical field phase distribution measurement device. Background technique [0002] The study of nanophotonics has rapidly become an international frontier and hot spot in recent years. The in-depth study of nanophotonics devices needs to be based on the quantitative measurement of various physical parameters and optical properties of the nanophotonic field. [0003] Near-field optics methods and techniques provide powerful tools for this. After the appearance of scanning near-field optical microscope (SNOM), it has been widely used in the field of nano-optics research. It has ultra-high spatial resolution on the order of sub-wavelength and can detect the light field characteristics of the sample at the same time. [0004] Most of the existing near-field optical microscopes can obtain the sample morphology and light intensity distribution, b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J9/02G01J1/42G01B11/24
Inventor 王佳武晓宇孙琳谭峭峰白本锋
Owner TSINGHUA UNIV
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