MEMS (micro-electromechanical system) semiconductor gas sensor as well as manufacturing method thereof and gas detection method

Abstract

The invention relates to a sensor for detecting gas, in particular to an MEMS (micro-electromechanical system) semiconductor gas sensor. The MEMS semiconductor gas sensor comprises a substrate with a hollow part and a sensing module which is formed on the substrate, wherein the sensing module comprises a first insulation layer, a heating resistor, a second insulation layer, a test electrode and a gas sensitive layer, which are sequentially superimposed; the sensor also comprises a control module and a temperature detection module, wherein the temperature detection module, the heating resistor and the test electrode are respectively connected with the control module; the temperature detection module is used for detecting ambient temperature and feeding the ambient temperature back to the control module, the control module adjusts the heating power of the heating resistor according to the ambient temperature so as to control the temperature of the gas sensitive layer to be increased to the needed working temperature. By adopting the sensor, the adverse effect of the variation of the ambient temperature on the gas sensitive layer can be reduced and even eliminated, and the performance of the gas sensor is guaranteed. The invention also provides a manufacturing method of the gas sensor and a detection method based on the sensor.

Description

technical field [0001] The invention relates to a sensor for gas detection, in particular to a MEMS semiconductor gas sensor, a manufacturing method thereof, and a gas detection method. Background technique [0002] The various environments of human production, living and living are filled with various gases. The detection of gases, especially the detection of toxic, harmful, flammable and explosive gases, is an important means to ensure people's safe production, healthy living and comfortable life. Gas sensors are widely used in petroleum, petrochemical, gas, metallurgy, electric power, automobile industry, environmental sanitation, meteorological detection, medical health, smart home, information technology and other fields. Among the existing gas sensors, semiconductor gas sensors are the most widely used. [0003] With the rapid development of MEMS (Micro Electromechanical System) technology, gas sensors have also developed in the direction of miniaturization, intellige...

AI Technical Summary

Problems solved by technology

However, this method cannot control the change in the working temperature of the sensitive material of the semiconductor gas sensor caused by the change in the ambient temperature, and it cannot control the performance change of the sensor as a result.

[0005] In practical applications, only the signal of the semiconductor gas sensor affected by temperature can be compensated, that is, the zero point drift and sensitivity drift caused by the change of the ambient temperature can be compensated, but the response recovery rate and linearity caused by the change of the ambient temperature cannot be compensated. , selectivity and other performance impacts are compensated

Due to the large hysteresis of this method, it cannot effectively reduce the adverse effects of ambient temperature on the performance of the bulk gas sensor.

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