Method of using thin plates of same kind of material to prepare rectangular grating structure

A technology of rectangular gratings and material thin plates, applied in diffraction gratings, cold cathode manufacturing, electrode system manufacturing, etc., can solve the problems of large side roughness, expensive equipment, small grating groove aspect ratio, etc., and achieve smooth and steep sides, The effect of large aspect ratio

Active Publication Date: 2014-09-10
HUADONG PHOTOELECTRIC TECHN INST OF ANHUI PROVINCE
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AI-Extracted Technical Summary

Problems solved by technology

In order to solve these problems, researchers tried to use the UV-LIGA process to prepare high-precision gratings, but practice has proved that this process still faces the problems ...
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Method used

[0025] a) Before stacking, the surface of the thin plate can be polished, polished and other similar processes, so that the upper and lower sur...
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Abstract

The invention relates to a method of using thin plates of the same kind of material to prepare a rectangular grating structure. Through cross superposition of two kinds of thin plates which are different in thicknesses according to a specific rule, a grating with specific periodic structures is manufactured. The period of the grating is decided by the thicknesses of the two kinds of thin plates. The widths of grating grooves are decided by the thicknesses of one kind of thin plates and the depths of the grating grooves are decided by face distances of the side faces of the two kinds of thin plates. The method is capable of preparing a high-precision grating which is high in depth-to-width ratio and smooth and steep in side faces. The grating structure is widely applicable to manufacturing of a slow-wave structure and a fine manufacturing mould of a vacuum electronic device.

Application Domain

Diffraction gratingsCold cathode manufacture

Technology Topic

Vacuum electronicsThin slab +6

Image

  • Method of using thin plates of same kind of material to prepare rectangular grating structure
  • Method of using thin plates of same kind of material to prepare rectangular grating structure
  • Method of using thin plates of same kind of material to prepare rectangular grating structure

Examples

  • Experimental program(2)

Example Embodiment

[0020] Example 1
[0021] First prepare the thickness respectively h 1 , H 2 Two kinds of thin plates, the surface of the thin plate is polished to make it smooth. Then, the two thin plates are stacked crosswise, and one of the end faces of the stacked structure meets the following requirements: 1) The distance between adjacent thin plates at this end is equal; 2) The thickness of the alternate thin plates is the same, and the side faces at this end are at the same On the plane; 3) The side of each sheet at the end face is perpendicular to the upper and lower surfaces of the sheet. Finally, through resistance welding or other processes, the structure becomes a whole. In this way, a grating structure is formed on the end surface, in which the period l of the grating is determined by the thickness of the two thin plates (ie l=h 1 +h 2 ), the depth of the grating groove is determined by the distance between adjacent sheets at the end, and the width of the grating groove is determined by the thickness of the grating recessed on the end surface.
[0022] The specific steps of this embodiment are as follows:
[0023] 1) Choose the same material and h 1 And h 2 Two thin plates, such as figure 1 As shown, the thickness is h 1 The length and width of the plate 1 are L 1 , W 1 , Using mechanical processing means to ensure that the upper and lower surfaces of the plate 1 and at least one side S 1 Smooth, thickness h 2 The length and width of the plate 2 are L 2 , W 2 , So that at least one side S of sheet 2 2 smooth.
[0024] 2) Such as figure 1 As shown, when two sheets are stacked together, the specific requirements for stacking are:
[0025] a) Before stacking, the surface of the thin plate can be polished and polished to make the upper and lower surfaces of the thin plate smooth, so that the two thin plates are in close contact when they are stacked, and the sidewall of the manufactured grating is smooth.
[0026] b) At the same time, it is necessary to ensure the smooth sides of the two thin plates S 1 And S 2 It is perpendicular to the upper and lower surfaces of the respective thin plates, which ensures that the bottom of the grating formed after processing is perpendicular to the side walls.
[0027] c) When stacked, the side S of the two thin plates 1 And S 2 Parallel to each other, the surface spacing is L 0 , This value determines the depth of the grating to be prepared.
[0028] 3) On the basis of step 2) preparing the structure, the thickness is h 1 A piece of thickness h is stacked on the upper surface of the thin plate 2 Of thin plates. The requirements of the thin plate are the same as in step 2), that is, at least one side of the plate is perpendicular to the upper and lower surfaces, and the surface smoothness of the side and the upper and lower surfaces meets the requirements of the final grating.
[0029] When stacked, the smooth side is the same as the side S of the sheet 1 in step 2) 1 On the same plane, that is, S 2 Face distance is L 0.
[0030] 4) In step 3) the thickness just stacked is h 2 On the surface of the thin plate, and then stack a piece of thickness h 1 The surface requirements of the newly stacked sheets are the same as in step 3). At the same time, the smooth side of the newly stacked sheet is required to be the same as the side S of the sheet 2 in step 2) 2 On the same plane.
[0031] 5) Repeat steps 3) and 4) until the period of the thin plate formation is equal to the period of the grating to be made, such as figure 2 The nine-period grating structure shown.
[0032] 6) Press the manufactured grating blanks with clamps, and then use resistance welding or other welding methods to make these thin plates into a whole, so a grating structure is formed on one end of the whole.
[0033] 7) Make the grating size meet the final requirements by cutting or grinding, and remove grease or contaminants on the grating sample surface by cleaning.

Example Embodiment

[0034] Example 2
[0035] To make an oxygen-free copper grating that can be used as a slow-wave system for diffracted radiation vacuum electronic devices, the grating period length l is 0.1 mm, the groove width is 0.05 mm, and the depth is 5 mm.
[0036] Step 1. Material preparation
[0037] Prepared by mechanical processing or purchased commercially to obtain oxygen-free copper sheets with a thickness of 0.05 mm, and then process these sheets by cutting into two cuboids with a width of 20 mm × 10 mm × 0.05 mm and 15 mm × 10 mm × 0.05 mm. A and B, the surface roughness of these cuboids is required to be less than 50nm.
[0038] Step 2. Stacking of plates
[0039] When stacking, two plates of different lengths should be alternately stacked, and the short and long sides are parallel to each other, and the following principles should be followed:
[0040] 1) The lengths of the alternate plates are the same, and the long and wide sides of the alternate plates must be completely aligned with each other;
[0041] 2) The lengths of adjacent plates are different. When stacking, the long sides of the same side of the adjacent plates are required to be on the same plane, and the distance between the sides of the short sides of one side is 5mm. The side of the other short side is on the same plane;
[0042] The shape of the stacked plates is like image 3 Shown.
[0043] Step 3. Welding the structure
[0044] Use clamps to tighten the stacked plates, and then weld the plates together through thermal resistance welding.
[0045] Step 4. Follow-up processing
[0046] Through wire cutting, the plate is cut into the final grating shape. And through chemical cleaning, clean the dirt on the grating surface.

PUM

PropertyMeasurementUnit
Slot width0.05mm
Depth5.0mm
Surface roughness<= 50.0nm

Description & Claims & Application Information

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