Method for preparing efficient ingot casting polycrystal
An ingot casting and high-efficiency technology, which is applied in the field of preparing high-efficiency ingot polycrystalline, can solve the problems of high crystal defect density and not being widely used, and achieve the effect of low defect density and simple process
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Embodiment 1
[0027] A method for preparing high-efficiency ingot polycrystals, comprising the steps of:
[0028] 1. Use a silicon wafer with a thickness of 180 microns commonly used in the industry as a soft template; the thickness of the silicon wafer can be 180±20 microns; the silicon wafer can be a single crystal silicon wafer or a polycrystalline silicon wafer or a similar single crystal silicon wafer;
[0029] 2. Clean and remove the damaged layer on the surface of the silicon wafer (both sides); wherein, the treated liquid can be acid liquid or alkaline liquid or TMAH and other liquids, and the thickness removed on one side is 1-20 microns, and the damaged layer The surface morphology of the removed silicon wafer can be a flat plane or a pyramidal alkali texture or a pitted acid texture;
[0030] 3. Use graphene solution for spraying. The solvent for dispersing graphene is ethanol, isopropanol or deionized water. The concentration of dispersion is 0.001-0.1g / L. Residual solid conten...
Embodiment 2
[0033] A method for preparing high-efficiency ingot polycrystals, comprising the steps of:
[0034] 1. Use a silicon wafer with a thickness of 180 microns commonly used in the industry as a soft template; the thickness of the silicon wafer can be 180±20 microns; the silicon wafer can be a single crystal silicon wafer or a polycrystalline silicon wafer or a similar single crystal silicon wafer;
[0035] 2. Clean and remove the damaged layer on the surface of the silicon wafer (both sides); wherein, the treated liquid can be acid liquid or alkaline liquid or TMAH and other liquids, and the thickness removed on one side is 1-20 microns, and the damaged layer The surface morphology of the removed silicon wafer can be a flat plane or a pyramidal alkali texture or a pitted acid texture;
[0036] 3. Oxidize one side of the silicon wafer in an oxidation furnace to form a silicon oxide film with a thickness of 20 to 5000 nm; the oxidation process can be dry oxygen oxidation (the oxygen...
Embodiment 3
[0039] A method for preparing high-efficiency ingot polycrystals, comprising the steps of:
[0040] 1. Use a silicon wafer with a thickness of 180 microns commonly used in the industry as a soft template; the thickness of the silicon wafer can be 180±20 microns; the silicon wafer can be a single crystal silicon wafer or a polycrystalline silicon wafer or a similar single crystal silicon wafer;
[0041] 2. Clean and remove the damaged layer on the surface of the silicon wafer (both sides); wherein, the treated liquid can be acid liquid or alkali liquid or TMAH and other liquids, and the thickness removed on one side is 1-20 microns, and the damaged layer The surface morphology of the removed silicon wafer can be a flat plane or a pyramidal alkali texture or a pitted acid texture;
[0042] 3. Deposit a layer of silicon nitride film on one side of the silicon wafer in a PECVD deposition furnace, with a thickness of 20-5000nm; wherein, the deposition furnace can be a plate furnace...
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Abstract
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