Unlock instant, AI-driven research and patent intelligence for your innovation.

Horizontal slit optical waveguide based microdisk resonant cavity and production method thereof

A slit light, resonant cavity technology, applied in the direction of optical waveguide, light guide, optics, etc., can solve problems such as high transmission loss, achieve high quality factor, simple process steps, and solve the effect of large transmission loss

Inactive Publication Date: 2014-10-15
NINGBO YINUO ELECTRONICS TECH
View PDF4 Cites 6 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method uses the high selectivity ratio of wet etching to fabricate a horizontal slit optical waveguide with a smooth surface, so as to maintain the characteristics of the waveguide that can confine light in low refractive index materials, and at the same time solve the high The problem of transmission loss, and further combined with the microdisk structure in the form of central pillar support, can constitute an optical resonant cavity with high quality factor, which is helpful to realize high-sensitivity biological or chemical integrated sensors

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Horizontal slit optical waveguide based microdisk resonant cavity and production method thereof
  • Horizontal slit optical waveguide based microdisk resonant cavity and production method thereof
  • Horizontal slit optical waveguide based microdisk resonant cavity and production method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Example 1 as Figure 4 As shown, the compound semiconductor thin film A 4 and the semiconductor thin film B 5 composed of In, Al, Ga, As, P elements according to different composition ratios are grown on the substrate 6, wherein the semiconductor thin film B 5 is sandwiched between the semiconductor thin film A between 4. The growth method usually adopts techniques such as molecular beam epitaxy or metal-organic chemical deposition or bonding, and the thickness of semiconductor thin film A4 and semiconductor thin film B5 is 10nm.

[0024] like Figure 5 As shown, the semiconductor thin film A4 and the semiconductor thin film B5 are made into circular microdiscs by photolithography and dry etching. Such a process ensures the verticality of the side walls of the circular microdiscs, and the diameter of the circular microdisks is 100um. .

[0025] like Image 6 As shown, the semiconductor film B5 is gradually etched from the sidewall to the inside by wet etching. Due t...

Embodiment 2

[0028] Embodiment 2 The thickness of semiconductor thin film A 4 and semiconductor thin film B 5 is 1um, the diameter of the disk is 1um, and the width of semiconductor thin film B 5 etched away in the radial direction is 1 μm, and other technical features are the same as in embodiment 1.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a horizontal slit optical waveguide based microdisk resonant cavity and a production method thereof. The horizontal slit optical waveguide based microdisk resonant cavity and the production method thereof belongs to the field of integrated optical sensing. The method uses the high selectivity ratio of wet etching to produce a horizontal slit optical waveguide with a smooth surface so as to maintain the characteristic of restricting light in a material in lower refractive index of the waveguide, and meanwhile solves the problem of high transmission loss of traditional slit optical waveguides. Furthermore, a central column support microdisk structure is combined to form an optical resonant cavity with high-quality factors. The horizontal slit optical waveguide based microdisk resonant cavity facilitates the forming of high-sensitivity biological or chemical integrated sensors.

Description

technical field [0001] The invention belongs to the field of integrated optical sensing, in particular to a microdisk resonant cavity based on a horizontal slit optical waveguide and a manufacturing method thereof. Background technique [0002] In the 21st century, biosensor technology has broad application prospects in clinical diagnosis, industrial control, food and drug analysis (including biopharmaceutical research and development), environmental protection, biotechnology, and biochip research in the national economy. According to institutional analysis, the global market value of biosensors will develop rapidly in recent years, reaching the level of the optical communication market. Compared with electrical or micromechanical sensors, optical biosensors have great advantages in detection methods, detection accuracy, response time, and stability. Among them, integrated optical sensors, and the corresponding lab-on-a-chip (lab-on-a-chip), are particularly concerned by re...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/12G02B6/136
Inventor 郑志强
Owner NINGBO YINUO ELECTRONICS TECH